Bin-Chang Chang

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Repair of photolithography masks by sub-wavelength artificial grati...
- Patent number 7,303,841
- Issue date Dec 4, 2007
- Taiwan Semiconductor Manufacturing Company
- Ming Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-step phase shift mask and methods for fabrication thereof
- Patent number 7,135,257
- Issue date Nov 14, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Repair of photolithography masks by sub-wavelength artificial grati...
- Publication number 20050214653
- Publication date Sep 29, 2005
- Ming Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Multi-step phase shift mask and methods for fabrication thereof
- Publication number 20050089764
- Publication date Apr 28, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY