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Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical (MEMS) fabry-perot interferometer, apparatus...
- Patent number 10,732,041
- Issue date Aug 4, 2020
- Teknologian tutkimuskeskus VTT Oy
- Heikki Saari
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
THERMAL DETECTOR AND THERMAL DETECTOR ARRAY
- Publication number 20200309603
- Publication date Oct 1, 2020
- Teknologian Tutkimuskeskus VTT Oy
- Aapo VARPULA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROELECTROMECHANICAL (MEMS) FABRY-PEROT INTERFEROMETER, APPARATUS...
- Publication number 20200124475
- Publication date Apr 23, 2020
- Teknologian Tutkimuskeskus VTT Oy
- Heikki SAARI
- B81 - MICRO-STRUCTURAL TECHNOLOGY