Bin-Ming Ben Tsai

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Prediction based chucking and lithography control optimization
- Patent number 10,788,759
- Issue date Sep 29, 2020
- KLA-Tencor Corporation
- Bin-Ming Benjamin Tsai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of optimizing an optical parametric model for structural ana...
- Patent number 10,325,004
- Issue date Jun 18, 2019
- KLA-Tencor Corporation
- Thaddeus G. Dziura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Prediction based chucking and lithography control optimization
- Patent number 10,036,964
- Issue date Jul 31, 2018
- KLA-Tencor Corporation
- Bin-Ming Benjamin Tsai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV high throughput inspection system for defect detection on patte...
- Patent number 9,377,414
- Issue date Jun 28, 2016
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Grant
Optimizing an optical parametric model for structural analysis usin...
- Patent number 9,310,296
- Issue date Apr 12, 2016
- KLA-Tencor Corporation
- Thaddeus G. Dziura
- G01 - MEASURING TESTING
Information Patent Grant
Dopant metrology with information feedforward and feedback
- Patent number 8,962,351
- Issue date Feb 24, 2015
- KLA-Tencor Corporation
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology using targets with field enhancement elements
- Patent number 8,879,073
- Issue date Nov 4, 2014
- KLA-Tencor Corporation
- Jonathan M. Madsen
- G01 - MEASURING TESTING
Information Patent Grant
Process aware metrology
- Patent number 8,832,611
- Issue date Sep 9, 2014
- KLA-Tencor Corp.
- Xuefeng Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
EUV high throughput inspection system for defect detection on patte...
- Patent number 8,692,986
- Issue date Apr 8, 2014
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Grant
EUV high throughput inspection system for defect detection on patte...
- Patent number 8,553,217
- Issue date Oct 8, 2013
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Grant
Dopant metrology with information feedforward and feedback
- Patent number 8,535,957
- Issue date Sep 17, 2013
- KLA-Tencor Corporation
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Process aware metrology
- Patent number 8,468,471
- Issue date Jun 18, 2013
- KLA-Tencor Corp.
- Xuefeng Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Confocal wafer inspection system and method
- Patent number 7,858,911
- Issue date Dec 28, 2010
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
Ultra-broadband UV microscope imaging system with wide range zoom c...
- Patent number 7,773,296
- Issue date Aug 10, 2010
- KLA-Tencor Corporation
- David R. Shafer
- G02 - OPTICS
Information Patent Grant
Segmented optical and electrical testing for photovoltaic devices
- Patent number 7,733,111
- Issue date Jun 8, 2010
- KLA-Tencor Corporation
- Guoheng Zhao
- F21 - LIGHTING
Information Patent Grant
Excimer laser inspection system
- Patent number 7,728,968
- Issue date Jun 1, 2010
- KLA-Tencor Technologies Corporation
- Bin-Ming Benjamin Tsai
- G01 - MEASURING TESTING
Information Patent Grant
Ion implant metrology system with fault detection and identification
- Patent number 7,660,686
- Issue date Feb 9, 2010
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
High throughput brightfield/darkfield water inspection system using...
- Patent number 7,554,655
- Issue date Jun 30, 2009
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
High throughput darkfield/brightfield wafer inspection system using...
- Patent number 7,522,275
- Issue date Apr 21, 2009
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
System and method for sensing using adjustable modulation transfer...
- Patent number 7,465,913
- Issue date Dec 16, 2008
- KLA-Tencor Corporation
- Yung-Ho Chuang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
High NA system for multiple mode imaging
- Patent number 7,457,034
- Issue date Nov 25, 2008
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G02 - OPTICS
Information Patent Grant
Ultra-broadband UV microscope imaging system with wide range zoom c...
- Patent number 7,423,805
- Issue date Sep 9, 2008
- KLA-Tencor Corporation
- David R. Shafer
- G02 - OPTICS
Information Patent Grant
Confocal wafer inspection method and apparatus using fly lens arran...
- Patent number 7,399,950
- Issue date Jul 15, 2008
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
High throughput brightfield/darkfield wafer inspection system using...
- Patent number 7,379,173
- Issue date May 27, 2008
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
High throughput darkfield/brightfield wafer inspection system using...
- Patent number 7,259,844
- Issue date Aug 21, 2007
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and apparatus for the inspection of either random...
- Patent number 7,218,768
- Issue date May 15, 2007
- KLA-Tencor Technologies Corporation
- David M. W. Evans
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
High throughput brightfield/darkfield wafer inspection system using...
- Patent number 7,164,475
- Issue date Jan 16, 2007
- KLA-Tencor Technologies Corporation
- Christopher R Fairley
- G01 - MEASURING TESTING
Information Patent Grant
Excimer laser inspection system
- Patent number 7,136,159
- Issue date Nov 14, 2006
- KLA-Tencor Technologies Corporation
- Bin-Ming Benjamin Tsai
- G01 - MEASURING TESTING
Information Patent Grant
System and method for sensing using adjustable modulation transfer...
- Patent number 7,126,100
- Issue date Oct 24, 2006
- KLA-Tencor Technologies Corporation
- Yung-Ho Chuang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Confocal wafer depth scanning inspection method
- Patent number 7,109,458
- Issue date Sep 19, 2006
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Prediction Based Chucking and Lithography Control Optimization
- Publication number 20180364579
- Publication date Dec 20, 2018
- KLA-Tencor Corporation
- Bin-Ming Benjamin Tsai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Prediction Based Chucking and Lithography Control Optimization
- Publication number 20160239600
- Publication date Aug 18, 2016
- KLA-Tencor Corporation
- Bin-Ming Benjamin Tsai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EUV High Throughput Inspection System For Defect Detection On Patte...
- Publication number 20140217299
- Publication date Aug 7, 2014
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Application
EUV High Throughput Inspection System For Defect Detection On Patte...
- Publication number 20140001370
- Publication date Jan 2, 2014
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Application
Process Aware Metrology
- Publication number 20130282340
- Publication date Oct 24, 2013
- Xuefeng Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Optical Metrology Using Targets With Field Enhancement Elements
- Publication number 20130222795
- Publication date Aug 29, 2013
- KLA-Tencor Corporation
- Jonathan M. Madsen
- G01 - MEASURING TESTING
Information Patent Application
PROCESS AWARE METROLOGY
- Publication number 20130080984
- Publication date Mar 28, 2013
- KLA-Tencor Corporation
- Xuefeng Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF OPTIMIZING AN OPTICAL PARAMETRIC MODEL FOR STRUCTURAL ANA...
- Publication number 20120323356
- Publication date Dec 20, 2012
- Thaddeus G. Dziura
- G01 - MEASURING TESTING
Information Patent Application
Optical inspection of a specimen using multi-channel responses from...
- Publication number 20100033716
- Publication date Feb 11, 2010
- Bin-Ming Benjamin Tsai
- G01 - MEASURING TESTING
Information Patent Application
Ultra-broadband UV microscope imaging system with wide range zoom c...
- Publication number 20090080065
- Publication date Mar 26, 2009
- KLA-Tencor Corporation
- David R. Shafer
- G02 - OPTICS
Information Patent Application
Optical inspection of a specimen using multi-channel responses from...
- Publication number 20080285023
- Publication date Nov 20, 2008
- KLA INSTRUMENTS CORPORATION
- Bin-Ming Benjamin Tsai
- G01 - MEASURING TESTING
Information Patent Application
Confocal wafer inspection system and method
- Publication number 20080273196
- Publication date Nov 6, 2008
- KLA-Tencor Corporation
- Christopher R. Fairley
- G02 - OPTICS
Information Patent Application
High throughput brightfield/darkfield water inspection system using...
- Publication number 20080225298
- Publication date Sep 18, 2008
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Application
High throughput darkfield/brightfield wafer inspection system using...
- Publication number 20080007726
- Publication date Jan 10, 2008
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Application
Excimer laser inspection system
- Publication number 20070121107
- Publication date May 31, 2007
- KLA-Tencor Technologies Corporation
- Bin-Ming Benjamin Tsai
- G02 - OPTICS
Information Patent Application
High throughput darkfield/brightfield wafer inspection system using...
- Publication number 20070115461
- Publication date May 24, 2007
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Application
Optical inspection of a specimen using multi-channel responses from...
- Publication number 20070076198
- Publication date Apr 5, 2007
- KLA INSTRUMENTS CORPORATION
- Bin-Ming Benjamin Tsai
- G01 - MEASURING TESTING
Information Patent Application
Confocal wafer inspection method and apparatus using fly lens arran...
- Publication number 20070007429
- Publication date Jan 11, 2007
- KLA-Tencor Corporation
- Christopher R. Fairley
- G02 - OPTICS
Information Patent Application
High NA system for multiple mode imaging
- Publication number 20060279837
- Publication date Dec 14, 2006
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G02 - OPTICS
Information Patent Application
System and method for sensing using adjustable modulation transfer...
- Publication number 20060266926
- Publication date Nov 30, 2006
- KLA-Tencor Corporation
- Yung-Ho Chuang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Optical inspection of a specimen using multi-channel responses from...
- Publication number 20060146319
- Publication date Jul 6, 2006
- KLA INSTRUMENTS CORPORATION
- Bin-Ming Benjamin Tsai
- G01 - MEASURING TESTING
Information Patent Application
Methods and system for evaluation with notification means
- Publication number 20050251438
- Publication date Nov 10, 2005
- Yi-Ming Tseng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Optical inspection of a specimen using multi-channel responses from...
- Publication number 20050162645
- Publication date Jul 28, 2005
- KLA INSTRUMENTS CORPORATION
- Bin-Ming Benjamin Tsai
- G01 - MEASURING TESTING
Information Patent Application
Confocal wafer inspection method and apparatus
- Publication number 20050156098
- Publication date Jul 21, 2005
- Christopher R. Fairley
- G02 - OPTICS
Information Patent Application
High throughput brightfield/darkfield wafer inspection system using...
- Publication number 20050062962
- Publication date Mar 24, 2005
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Application
Ultra-broadband UV microscope imaging system with wide range zoom c...
- Publication number 20050057796
- Publication date Mar 17, 2005
- David R. Shafer
- G02 - OPTICS
Information Patent Application
High throughput brightfield/darkfield wafer inspection system using...
- Publication number 20040252297
- Publication date Dec 16, 2004
- KLA-Tencor Technologies Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Application
Optical inspection of a specimen using multi-channel responses from...
- Publication number 20040223146
- Publication date Nov 11, 2004
- KLA INSTRUMENTS CORPORATION
- Bin-Ming Benjamin Tsai
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus for the inspection of either random...
- Publication number 20040202361
- Publication date Oct 14, 2004
- David M.W. Evans
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Excimer laser inspection system
- Publication number 20040095573
- Publication date May 20, 2004
- Bin-Ming Benjamin Tsai
- G02 - OPTICS

Bin-Ming Ben Tsai

Person

Patents Grantslast 30 patents

Prediction based chucking and lithography control optimization

Method of optimizing an optical parametric model for structural ana...

Prediction based chucking and lithography control optimization

EUV high throughput inspection system for defect detection on patte...

Optimizing an optical parametric model for structural analysis usin...

Dopant metrology with information feedforward and feedback

Optical metrology using targets with field enhancement elements

Process aware metrology

EUV high throughput inspection system for defect detection on patte...

EUV high throughput inspection system for defect detection on patte...

Dopant metrology with information feedforward and feedback

Process aware metrology

Confocal wafer inspection system and method

Ultra-broadband UV microscope imaging system with wide range zoom c...

Segmented optical and electrical testing for photovoltaic devices

Excimer laser inspection system

Ion implant metrology system with fault detection and identification

High throughput brightfield/darkfield water inspection system using...

High throughput darkfield/brightfield wafer inspection system using...

System and method for sensing using adjustable modulation transfer...

High NA system for multiple mode imaging

Ultra-broadband UV microscope imaging system with wide range zoom c...

Confocal wafer inspection method and apparatus using fly lens arran...

High throughput brightfield/darkfield wafer inspection system using...

High throughput darkfield/brightfield wafer inspection system using...

Inspection method and apparatus for the inspection of either random...

High throughput brightfield/darkfield wafer inspection system using...

Excimer laser inspection system

System and method for sensing using adjustable modulation transfer...

Confocal wafer depth scanning inspection method

Patents Applicationslast 30 patents

Prediction Based Chucking and Lithography Control Optimization

Prediction Based Chucking and Lithography Control Optimization

EUV High Throughput Inspection System For Defect Detection On Patte...

EUV High Throughput Inspection System For Defect Detection On Patte...

Process Aware Metrology

Optical Metrology Using Targets With Field Enhancement Elements

PROCESS AWARE METROLOGY

METHOD OF OPTIMIZING AN OPTICAL PARAMETRIC MODEL FOR STRUCTURAL ANA...

Optical inspection of a specimen using multi-channel responses from...

Ultra-broadband UV microscope imaging system with wide range zoom c...

Optical inspection of a specimen using multi-channel responses from...

Confocal wafer inspection system and method

High throughput brightfield/darkfield water inspection system using...

High throughput darkfield/brightfield wafer inspection system using...

Excimer laser inspection system

High throughput darkfield/brightfield wafer inspection system using...

Optical inspection of a specimen using multi-channel responses from...

Confocal wafer inspection method and apparatus using fly lens arran...

High NA system for multiple mode imaging

System and method for sensing using adjustable modulation transfer...

Optical inspection of a specimen using multi-channel responses from...

Methods and system for evaluation with notification means

Optical inspection of a specimen using multi-channel responses from...

Confocal wafer inspection method and apparatus

High throughput brightfield/darkfield wafer inspection system using...

Ultra-broadband UV microscope imaging system with wide range zoom c...

High throughput brightfield/darkfield wafer inspection system using...

Optical inspection of a specimen using multi-channel responses from...

Inspection method and apparatus for the inspection of either random...

Excimer laser inspection system