Bin SHAN

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Wuhan, Hubei, CN

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Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition device for massively coating micro-nano par...
- Patent number 11,236,421
- Issue date Feb 1, 2022
- Huazhong University of Science & Technology
- Rong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION DEVICE FOR MASSIVELY COATING MICRO-NANO PAR...
- Publication number 20210332478
- Publication date Oct 28, 2021
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Rong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR INJECTOR AND DEVICE FOR SPATIAL ATOMIC LAYER DEPOSITION
- Publication number 20200131637
- Publication date Apr 30, 2020
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Rong CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...