Bin Zhao

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,501,976
- Issue date Nov 15, 2022
- Tokyo Electron Limited
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210265170
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Seiichi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REWORK METHOD OF METAL HARD MASK
- Publication number 20100190272
- Publication date Jul 29, 2010
- United Microelectronics Corp.
- Yu Zhang
- H01 - BASIC ELECTRIC ELEMENTS