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last 30 patents
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Patent Grant
Cantilever beam structure where stress is matched and method of man...
Patent number
9,260,297
Issue date
Feb 16, 2016
Institute of Microelectronics, Chinese Academy of Sciences
Binbin Jiao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micrometer-scale grid structure based on single crystal silicon and...
Patent number
8,652,867
Issue date
Feb 18, 2014
Institute of Microelectronics, Chinese Academy of Sciences
Binbin Jiao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
CANTILEVER BEAM STRUCTURE WHERE STRESS IS MATCHED AND METHOD OF MAN...
Publication number
20140374857
Publication date
Dec 25, 2014
Institute of Microelectronics, Chinese Academy of Sciences
Binbin Jiao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micrometer-scale Grid Structure Based on Single Crystal Silicon and...
Publication number
20110175180
Publication date
Jul 21, 2011
Binbin Jiao
B81 - MICRO-STRUCTURAL TECHNOLOGY