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Eindhoven, NL
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last 30 patents
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Patent Grant
Overlay metrology system and method
Patent number
9,329,495
Issue date
May 3, 2016
GLOBALFOUNDRIES Inc.
Xintuo Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
OVERLAY METROLOGY SYSTEM AND METHOD
Publication number
20150138555
Publication date
May 21, 2015
GLOBALFOUNDRIES INC.
Xintuo DAI
H01 - BASIC ELECTRIC ELEMENTS