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Binet A. Worsham
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Lag control
Patent number
7,789,991
Issue date
Sep 7, 2010
Lam Research Corporation
Binet A. Worsham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch with photoresist mask
Patent number
7,442,649
Issue date
Oct 28, 2008
Lam Research Corporation
Jisoo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lag control
Patent number
7,307,025
Issue date
Dec 11, 2007
Lam Research Corporation
Binet A. Worsham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for the optimization of substrate etching in a plasma proce...
Patent number
7,078,350
Issue date
Jul 18, 2006
Lam Research Corporation
Jisoo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for inspecting contact openings in a plasma p...
Patent number
6,979,579
Issue date
Dec 27, 2005
Lam Research Corporation
Jisoo Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Etch with photoresist mask
Publication number
20060223327
Publication date
Oct 5, 2006
Lam Research Corporation
Jisoo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for the optimization of substrate etching in a plasma proce...
Publication number
20050205519
Publication date
Sep 22, 2005
Jisoo Kim
H01 - BASIC ELECTRIC ELEMENTS