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Bingliang GUO

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  • Beijing, CN
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Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtering method
    • Patent number 11,710,624
    • Issue date Jul 25, 2023
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Bingliang Guo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Loading apparatus and physical vapor deposition apparatus
    • Patent number 11,315,768
    • Issue date Apr 26, 2022
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Xuewei Wu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition apparatus and physical vapor deposition chamber
    • Patent number 10,984,994
    • Issue date Apr 20, 2021
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Jun Zhang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Heating device and heating chamber
    • Patent number 10,937,672
    • Issue date Mar 2, 2021
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Jun Zhang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming method and aluminum nitride film forming method for se...
    • Patent number 10,643,843
    • Issue date May 5, 2020
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Jun Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for forming film and method for forming aluminum nitride film
    • Patent number 10,640,862
    • Issue date May 5, 2020
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Jun Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    MAGNETRON SPUTTERING APPARATUS
    • Publication number 20240068087
    • Publication date Feb 29, 2024
    • Beijing NAURA Microelectronics Equipment Co., Ltd.
    • Shubo WU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING METHOD
    • Publication number 20210040605
    • Publication date Feb 11, 2021
    • Beijing NAURA Microelectronics Equipment Co., Ltd.
    • Bingliang GUO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LOADING APPARATUS AND PHYSICAL VAPOR DEPOSITION APPARATUS
    • Publication number 20200144035
    • Publication date May 7, 2020
    • Beijing NAURA Microelectronics Equipment Co., Ltd.
    • Xuewei WU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS AND PHYSICAL VAPOR DEPOSITION CHAMBER
    • Publication number 20180247799
    • Publication date Aug 30, 2018
    • Beijing NAURA Microelectronics Equipment Co., Ltd.
    • Jun ZHANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR FORMING FILM AND METHOD FOR FORMING ALUMINUM NITRIDE FILM
    • Publication number 20180230586
    • Publication date Aug 16, 2018
    • Beijing NAURA Microelectronics Equipment Co., Ltd.
    • Jun WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND ALUMINUM NITRIDE FILM FORMING METHOD FOR SE...
    • Publication number 20170365466
    • Publication date Dec 21, 2017
    • Beijing NAURA Microelectronics Equipment Co., Ltd.
    • Jun WANG
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    HEATING DEVICE AND HEATING CHAMBER
    • Publication number 20170365493
    • Publication date Dec 21, 2017
    • Beijing NAURA Microelectronics Equipment Co., Ltd.
    • Jun ZHANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...