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Binxi Gu
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Cupertino, CA, US
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last 30 patents
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Patent Grant
Method of etching an organic low-k dielectric material
Patent number
7,585,778
Issue date
Sep 8, 2009
Applied Materials, Inc.
Chang-Lin Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR FABRICATING LOW K DIELECTRIC DUAL DAMASCENE STRUCTURES
Publication number
20090156012
Publication date
Jun 18, 2009
Applied Materials, Inc.
CHANG-LIN HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING AN ORGANIC LOW-K DIELECTRIC MATERIAL
Publication number
20080237183
Publication date
Oct 2, 2008
CHANG-LIN HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Carbon-doped-Si oxide etch using H2 additive in fluorocarbon etch c...
Publication number
20050266691
Publication date
Dec 1, 2005
Applied Materials Inc.
Binxi Gu
H01 - BASIC ELECTRIC ELEMENTS