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Birgit Enkisch
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Lens made of a crystalline material
Patent number
7,672,044
Issue date
Mar 2, 2010
Carl Zeiss SMT AG
Birgit Enkisch
B24 - GRINDING POLISHING
Information
Patent Grant
Optically polarizing retardation arrangement, and a microlithograph...
Patent number
7,411,656
Issue date
Aug 12, 2008
Carl Zeiss SMT AG
Michael Totzeck
G02 - OPTICS
Information
Patent Grant
Objective with fluoride crystal lenses
Patent number
7,382,536
Issue date
Jun 3, 2008
Carl Zeiss SMT AG
Daniel Krähmer
G02 - OPTICS
Information
Patent Grant
Lens made of a crystalline material
Patent number
7,292,388
Issue date
Nov 6, 2007
Carl Zeiss SMT AG
Birgit Enkisch
B24 - GRINDING POLISHING
Information
Patent Grant
Objective with fluoride crystal lenses
Patent number
7,180,667
Issue date
Feb 20, 2007
Carl Zeiss SMT AG
Daniel Krähmer
G02 - OPTICS
Information
Patent Grant
Objective with fluoride crystal lenses
Patent number
7,145,720
Issue date
Dec 5, 2006
Carl Zeiss SMT AG
Daniel Krähmer
G02 - OPTICS
Information
Patent Grant
Objective with fluoride crystal lenses
Patent number
7,126,765
Issue date
Oct 24, 2006
Carl Zeiss SMT AG
Daniel Krähmer
G02 - OPTICS
Information
Patent Grant
Optically polarizing retardation arrangement, and microlithography...
Patent number
7,053,988
Issue date
May 30, 2006
Carl Zeiss SMT AG
Michael Totzeck
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL SYSTEM COMPRISING AN EUV MIRROR AND METHOD FOR OPERATING AN...
Publication number
20250060517
Publication date
Feb 20, 2025
Carl Zeiss SMT GMBH
Hartmut Enkisch
G02 - OPTICS
Information
Patent Application
Lens Made of a Crystalline Material
Publication number
20080019013
Publication date
Jan 24, 2008
Carl Zeiss SMT AG
Birgit Enkisch
B24 - GRINDING POLISHING
Information
Patent Application
Objective with fluoride crystal lenses
Publication number
20060171020
Publication date
Aug 3, 2006
Carl Zeiss SMT AG
Daniel Krahmer
G02 - OPTICS
Information
Patent Application
Optically polarizing retardation arrangement, and a microlithograph...
Publication number
20060152701
Publication date
Jul 13, 2006
Carl Zeiss SMT AG
Michael Totzeck
G02 - OPTICS
Information
Patent Application
Lens made of a crystalline material
Publication number
20050170748
Publication date
Aug 4, 2005
Birgit Enkisch
B24 - GRINDING POLISHING
Information
Patent Application
Objective with fluoride crystal lenses
Publication number
20050122594
Publication date
Jun 9, 2005
Carl Zeiss SMT AG, a Germany corporation
Daniel Krahmer
G02 - OPTICS
Information
Patent Application
Objective with fluoride crystal lenses
Publication number
20040190151
Publication date
Sep 30, 2004
Daniel Krahmer
G02 - OPTICS
Information
Patent Application
Optically polarizing retardation arrangement, and microlithography...
Publication number
20040184019
Publication date
Sep 23, 2004
Carl Zeiss SMT AG
Michael Totzeck
G02 - OPTICS
Information
Patent Application
Objective with fluoride crystal lenses
Publication number
20040105170
Publication date
Jun 3, 2004
Carl Zeiss SMT AG
Daniel Krahmer
G02 - OPTICS