Birgit Kuerz

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical device with raster elements, and illumination system with t...
- Patent number 7,605,386
- Issue date Oct 20, 2009
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Grant
Beam reshaping unit for an illumination system of a microlithograph...
- Patent number 7,542,217
- Issue date Jun 2, 2009
- Carl Zeiss SMT AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Objective with crystal lenses
- Patent number 7,239,447
- Issue date Jul 3, 2007
- Carl Zeiss SMT AG
- Aksel Goehnermeier
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Objective with crystal lenses
- Publication number 20070242250
- Publication date Oct 18, 2007
- Carl Zeiss SMT AG
- Aksel Goehnermeier
- G02 - OPTICS
Information Patent Application
Optical device with raster elements, and illumination system with t...
- Publication number 20070146853
- Publication date Jun 28, 2007
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Polarization-optimized illumination system
- Publication number 20070024972
- Publication date Feb 1, 2007
- Carl Zeiss SMT AG
- Birgit Kuerz
- G02 - OPTICS
Information Patent Application
Beam reshaping unit for an illumination system of a microlithograph...
- Publication number 20050219495
- Publication date Oct 6, 2005
- Carl Zeiss SMT AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Catadioptric reduction objective
- Publication number 20050190446
- Publication date Sep 1, 2005
- CARL ZEISS AMT AG
- Birgit Kuerz
- G02 - OPTICS
Information Patent Application
Objective with crystal lenses
- Publication number 20050157401
- Publication date Jul 21, 2005
- Aksel Goehnermeier
- G02 - OPTICS