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Birgit Schabinger
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Poing, DE
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Patents Grants
last 30 patents
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Patent Grant
Charged particle beam device and method for inspecting and/or imagi...
Patent number
11,239,043
Issue date
Feb 1, 2022
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and method for inspecting and/or imagi...
Patent number
11,183,361
Issue date
Nov 23, 2021
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
DETECTOR DEVICE, ELECTRON BEAM APPARATUS, AND METHOD FOR INSPECTING...
Publication number
20250125118
Publication date
Apr 17, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Birgit Schabinger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING AND/OR IMAGI...
Publication number
20210366686
Publication date
Nov 25, 2021
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING AND/OR IMAGI...
Publication number
20210366683
Publication date
Nov 25, 2021
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS