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Bjorn A. M. Hansson
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La Jolla, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Laser produced plasma EUV light source
Patent number
7,598,509
Issue date
Oct 6, 2009
Cymer, Inc.
Alexander I. Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV light source
Patent number
7,453,077
Issue date
Nov 18, 2008
Cymer, Inc.
Norbert R. Bowering
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems for protecting internal components of an EUV light source f...
Patent number
7,109,503
Issue date
Sep 19, 2006
Cymer, Inc.
Norbert R. Bowering
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
EUV light source
Publication number
20070102653
Publication date
May 10, 2007
Cymer, Inc.
Norbert R. Bowering
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser produced plasma EUV light source
Publication number
20060219957
Publication date
Oct 5, 2006
Cymer, Inc.
Alexander I. Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE F...
Publication number
20060192151
Publication date
Aug 31, 2006
Cymer, Inc.
Norbert R. Bowering
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Systems and methods for reducing the influence of plasma-generated...
Publication number
20050269529
Publication date
Dec 8, 2005
Cymer, Inc.
Alexander I. Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LPP EUV light source
Publication number
20050205811
Publication date
Sep 22, 2005
William N. Partlo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR