Björn Liebaug

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Ulm, DE

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Patents Grantslast 30 patents

Information Patent Grant
Beam-forming and illuminating system for a lithography system, lith...
- Patent number 11,448,968
- Issue date Sep 20, 2022
- Carl Zeiss SMT GmbH
- Hubert Holderer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and method
- Patent number 10,831,114
- Issue date Nov 10, 2020
- Carl Zeiss SMT GmbH
- Björn Liebaug
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
BEAM-FORMING AND ILLUMINATING SYSTEM FOR A LITHOGRAPHY SYSTEM, LITH...
- Publication number 20210003925
- Publication date Jan 7, 2021
- Carl Zeiss SMT GMBH
- Hubert Holderer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD
- Publication number 20190377273
- Publication date Dec 12, 2019
- Carl Zeiss SMT GMBH
- Björn Liebaug
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY