Blaine R. Spady

Person

Lincoln, NE, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology/inspection positioning system
- Patent number 7,295,314
- Issue date Nov 13, 2007
- Nanometrics Incorporated
- Blaine R. Spady
- G01 - MEASURING TESTING
Information Patent Grant
Image control in a metrology/inspection positioning system
- Patent number 7,289,215
- Issue date Oct 30, 2007
- Nanometrics Incorporated
- Blaine R. Spady
- G02 - OPTICS
Information Patent Grant
Edge grip chuck
- Patent number 7,032,287
- Issue date Apr 25, 2006
- Nanometrics Incorporated
- Blaine R. Spady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Encoder measurement based on layer thickness
- Patent number 6,970,255
- Issue date Nov 29, 2005
- Nanometrics Incorporated
- Blaine R. Spady
- G01 - MEASURING TESTING
Information Patent Grant
Precision polar coordinate stage
- Patent number 6,910,847
- Issue date Jun 28, 2005
- Nanometrics Incorporated
- Christopher W. Blaufus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage with two substrate buffer station
- Patent number 6,854,948
- Issue date Feb 15, 2005
- Nanometrics Incorporated
- Blaine R. Spady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High precision substrate prealigner
- Patent number 6,836,690
- Issue date Dec 28, 2004
- Nanometrics Incorporated
- Blaine R. Spady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact rotating stage
- Patent number 6,779,278
- Issue date Aug 24, 2004
- Nanometrics Incorporated
- Blaine R. Spady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System using a polar coordinate stage and continuous image rotation...
- Patent number 6,320,609
- Issue date Nov 20, 2001
- Nanometrics Incorporated
- Robert Buchanan
- G02 - OPTICS
Information Patent Grant
Compact optical reflectometer system
- Patent number 6,181,427
- Issue date Jan 30, 2001
- Nanometrics Incorporated
- Richard A. Yarussi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IMAGE CONTROL IN A METROLOGY/INSPECTION POSITIONING SYSTEM
- Publication number 20070222991
- Publication date Sep 27, 2007
- Nanometrics Incorporated
- Blaine R. Spady
- G02 - OPTICS

Blaine R. Spady

Person

Patents Grantslast 30 patents

Metrology/inspection positioning system

Image control in a metrology/inspection positioning system

Edge grip chuck

Encoder measurement based on layer thickness

Precision polar coordinate stage

Stage with two substrate buffer station

High precision substrate prealigner

Compact rotating stage

System using a polar coordinate stage and continuous image rotation...

Compact optical reflectometer system

Patents Applicationslast 30 patents

IMAGE CONTROL IN A METROLOGY/INSPECTION POSITIONING SYSTEM