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Cambridge, MA, US
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last 30 patents
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Patent Application
Method for removing surface deposits and passivating interior surfa...
Publication number
20090047447
Publication date
Feb 19, 2009
Herbert H. Sawin
B08 - CLEANING
Information
Patent Application
Method for removing surface deposits in the interior of a chemical...
Publication number
20080087642
Publication date
Apr 17, 2008
Herbert H. Sawin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of using NF3 for removing surface deposits from the interior...
Publication number
20070107750
Publication date
May 17, 2007
Herbert H. Sawin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of using NF3 for removing surface deposits
Publication number
20070028944
Publication date
Feb 8, 2007
Herbert H. Sawin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of using sulfur fluoride for removing surface deposits
Publication number
20070028943
Publication date
Feb 8, 2007
Herbert H. Sawin
B08 - CLEANING
Information
Patent Application
Remote chamber methods for removing surface deposits
Publication number
20060144819
Publication date
Jul 6, 2006
Herbert H. Sawin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Remote chamber methods for removing surface deposits
Publication number
20060144820
Publication date
Jul 6, 2006
Herbert H. Sawin
B08 - CLEANING
Information
Patent Application
Remote chamber methods for removing surface deposits
Publication number
20050258137
Publication date
Nov 24, 2005
Herbert H. Sawin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...