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last 30 patents
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Patent Grant
Extreme ultraviolet lithography method, extreme ultraviolet mask an...
Patent number
12,072,633
Issue date
Aug 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of reducing undesired light influence in extreme ultraviolet...
Patent number
12,013,641
Issue date
Jun 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for aligning master oscillator power amplifier...
Patent number
11,973,302
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Lin Louis Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radiation source for lithography process
Patent number
11,829,082
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shang-Ying Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
Patent number
11,792,909
Issue date
Oct 17, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Chih Lai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet mask and method of manufacturing the same
Patent number
11,774,844
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Residual gain monitoring and reduction for EUV drive laser
Patent number
11,737,200
Issue date
Aug 22, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Lin Louis Chang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
EUV radiation generation methods and systems
Patent number
11,723,141
Issue date
Aug 8, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Lin Louis Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet lithography method, extreme ultraviolet mask an...
Patent number
11,720,025
Issue date
Aug 8, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Light source, EUV lithography system, and method for performing cir...
Patent number
11,703,769
Issue date
Jul 18, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of reducing undesired light influence in extreme ultraviolet...
Patent number
11,703,762
Issue date
Jul 18, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
Patent number
11,630,393
Issue date
Apr 18, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chieh Hsieh
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Droplet generator and method of servicing extreme ultraviolet imagi...
Patent number
11,617,255
Issue date
Mar 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Chih Lai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for aligning master oscillator power amplifier...
Patent number
11,588,293
Issue date
Feb 21, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Lin Louis Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
EUV lithography system and method for decreasing debris in EUV lith...
Patent number
11,531,278
Issue date
Dec 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Light source for lithography exposure process
Patent number
11,483,918
Issue date
Oct 25, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chieh Hsieh
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV radiation modification methods and systems
Patent number
11,419,203
Issue date
Aug 16, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Lin Louis Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet lithography method, extreme ultraviolet mask an...
Patent number
11,392,022
Issue date
Jul 19, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Light source, EUV lithography system, and method for generating EUV...
Patent number
11,333,983
Issue date
May 17, 2022
TAIWAN SEMICONDUCTOR MANFACTURING COMPANY, LTD.
Chi Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet mask and method of manufacturing the same
Patent number
11,275,301
Issue date
Mar 15, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source for lithography process
Patent number
11,275,318
Issue date
Mar 15, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Shang-Ying Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
Patent number
11,269,257
Issue date
Mar 8, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chieh Hsieh
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for extreme ultraviolet source control
Patent number
11,224,115
Issue date
Jan 11, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Chia Hsu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV vessel inspection method and related system
Patent number
11,092,555
Issue date
Aug 17, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Lin Louis Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
Patent number
11,013,097
Issue date
May 18, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Chih Lai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Light source for lithography exposure process
Patent number
10,993,308
Issue date
Apr 27, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chieh Hsieh
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for detecting EUV pellicle rupture
Patent number
10,976,674
Issue date
Apr 13, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Residual gain monitoring and reduction for EUV drive laser
Patent number
10,980,100
Issue date
Apr 13, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Lin Louis Chang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Radiation source apparatus and method for decreasing debris in radi...
Patent number
10,955,762
Issue date
Mar 23, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chi Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source for lithography process
Patent number
10,928,741
Issue date
Feb 23, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Shang-Ying Wu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...
Publication number
20240297476
Publication date
Sep 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Lin Louis Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF REDUCING UNDESIRED LIGHT INFLUENCE IN EXTREME ULTRAVIOLET...
Publication number
20240295820
Publication date
Sep 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tsung SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME
Publication number
20230367195
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tsung SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
Publication number
20230363074
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chih LAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LI...
Publication number
20230324813
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi YANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AN...
Publication number
20230324804
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Tsung SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...
Publication number
20230208092
Publication date
Jun 29, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Lin Louis Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE WITH MULTIPLE HARDWARE SIGNATURES FROM A SINGLE PUF CIRCUIT...
Publication number
20230208657
Publication date
Jun 29, 2023
National Yang Ming Chiao Tung University
Wai-Chi FANG
H04 - ELECTRIC COMMUNICATION TECHNIQUE
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Patent Application
EUV RADIATION GENERATION METHODS AND SYSTEMS
Publication number
20220386440
Publication date
Dec 1, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Lin Louis CHANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD OF REDUCING UNDESIRED LIGHT INFLUENCE IN EXTREME ULTRAVIOLET...
Publication number
20220373890
Publication date
Nov 24, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tsung SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DROPLET GENERATOR AND METHOD OF SERVICING EXTREME ULTRAVIOLET IMAGI...
Publication number
20220338336
Publication date
Oct 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chih LAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AN...
Publication number
20220326598
Publication date
Oct 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Tsung SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR PERFORMING CIR...
Publication number
20220276574
Publication date
Sep 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
Publication number
20220260922
Publication date
Aug 18, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chieh HSIEH
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME
Publication number
20220197127
Publication date
Jun 23, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tsung SHIH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
RADIATION SOURCE FOR LITHOGRAPHY PROCESS
Publication number
20220197160
Publication date
Jun 23, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Shang-Ying WU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AN...
Publication number
20210389661
Publication date
Dec 16, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Tsung SHIH
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
Publication number
20210274627
Publication date
Sep 2, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chih LAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LIGHT SOURCE FOR LITHOGRAPHY EXPOSURE PROCESS
Publication number
20210243875
Publication date
Aug 5, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Chieh HSIEH
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Residual gain monitoring and reduction for EUV drive laser
Publication number
20210235572
Publication date
Jul 29, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Lin Louis Chang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Patent Application
EUV LITHOGRAPHY SYSTEM AND METHOD FOR DECREASING DEBRIS IN EUV LITH...
Publication number
20210223708
Publication date
Jul 22, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi YANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Application
RADIATION SOURCE FOR LITHOGRAPHY PROCESS
Publication number
20210173316
Publication date
Jun 10, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Shang-Ying WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV RADIATION MODIFICATION METHODS AND SYSTEMS
Publication number
20210168923
Publication date
Jun 3, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Lin Louis CHANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
System and Method for Extreme Ultraviolet Source Control
Publication number
20210068241
Publication date
Mar 4, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Chia Hsu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Application
LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR GENERATING EUV...
Publication number
20210055664
Publication date
Feb 25, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi YANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
Publication number
20210041787
Publication date
Feb 11, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Chieh HSIEH
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
RADIATION SOURCE APPARATUS AND METHOD FOR DECREASING DEBRIS IN RADI...
Publication number
20200348607
Publication date
Nov 5, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chi YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EUV VESSEL INSPECTION METHOD AND RELATED SYSTEM
Publication number
20200348241
Publication date
Nov 5, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Lin Louis CHANG
G01 - MEASURING TESTING
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Patent Application
RADIATION SOURCE FOR LITHOGRAPHY PROCESS
Publication number
20200278617
Publication date
Sep 3, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Shang-Ying WU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CONVEYING PIPELINE, MANUFACTURING METHOD THEREOF, AND BIONIC PLATFORM
Publication number
20200173984
Publication date
Jun 4, 2020
National Tsing-Hua University
Fan-Gang Tseng
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL