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Bo LENSSEN
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Belfeld, NL
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Patents Grants
last 30 patents
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Patent Grant
Pressure control valve, a fluid handling structure for lithographic...
Patent number
11,199,771
Issue date
Dec 14, 2021
ASML Netherlands B.V.
Stef Marten Johan Janssens
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Sensor, object positioning system, lithographic apparatus and devic...
Patent number
10,061,213
Issue date
Aug 28, 2018
ASML Netherlands B.V.
Johannes Antonius Gerardus Akkermans
G01 - MEASURING TESTING
Information
Patent Grant
Sensor, object positioning system, lithographic apparatus and devic...
Patent number
10,012,914
Issue date
Jul 3, 2018
ASML Netherlands B.V.
Johannes Antonius Gerardus Akkermans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC...
Publication number
20220075264
Publication date
Mar 10, 2022
ASML NETHERLANDS B.V.
Stef Marten Johan JANSSENS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPH...
Publication number
20200041895
Publication date
Feb 6, 2020
ASML NETHERLANDS B.V.
Stef Marten Johan JANSSENS
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVIC...
Publication number
20170277042
Publication date
Sep 28, 2017
ASML NETHERLANDS B.V.
Johannes Antonius Gerardus AKKERMANS
G01 - MEASURING TESTING