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DEFECT FREE GERMANIUM OXIDE GAP FILL
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Publication number 20230407468
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Publication date Dec 21, 2023
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Applied Materials, Inc.
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Huiyuan Wang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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LOW-K BORON CARBONITRIDE FILMS
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Publication number 20220223409
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Publication date Jul 14, 2022
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Applied Materials, Inc.
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Zeqing Shen
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H01 - BASIC ELECTRIC ELEMENTS
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SUPER-CONFORMAL GERMANIUM OXIDE FILMS
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Publication number 20220186365
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Publication date Jun 16, 2022
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Applied Materials, Inc.
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Huiyuan Wang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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DEFECT FREE GERMANIUM OXIDE GAP FILL
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Publication number 20220189824
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Publication date Jun 16, 2022
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Applied Materials, Inc.
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Huiyuan Wang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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HDP SACRIFICIAL CARBON GAPFILL
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Publication number 20220127718
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Publication date Apr 28, 2022
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Applied Materials, Inc.
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Zeqing Shen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CONFORMAL SILICON OXIDE FILM DEPOSITION
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Publication number 20220130658
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Publication date Apr 28, 2022
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Applied Materials, Inc.
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Zeqing Shen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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DOPING SEMICONDUCTOR FILMS
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Publication number 20220093390
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Publication date Mar 24, 2022
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Applied Materials, Inc.
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Aykut Aydin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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STACK FOR 3D-NAND MEMORY CELL
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Publication number 20210327891
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Publication date Oct 21, 2021
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Applied Materials, Inc.
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Takehito Koshizawa
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H01 - BASIC ELECTRIC ELEMENTS
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Hydrogen Free Silicon Dioxide
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Publication number 20210254210
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Publication date Aug 19, 2021
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Applied Materials, Inc.
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Zeqing Shen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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HIGH BORON-CONTENT HARD MASK MATERIALS
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Publication number 20210175078
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Publication date Jun 10, 2021
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Applied Materials, Inc.
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Bo Qi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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3D NAND Etch
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Publication number 20210118691
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Publication date Apr 22, 2021
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Applied Materials, Inc.
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Shishi Jiang
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H01 - BASIC ELECTRIC ELEMENTS
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3D NAND Etch
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Publication number 20200035505
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Publication date Jan 30, 2020
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Applied Materials, Inc.
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Shishi Jiang
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H01 - BASIC ELECTRIC ELEMENTS
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