Bo Su

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Computer-implemented methods and systems for determining different...
- Patent number 8,102,408
- Issue date Jan 24, 2012
- KLA-Tencor Technologies Corp.
- Gaurav Verma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Computer-implemented methods, systems, and computer-readable media...
- Patent number 7,962,863
- Issue date Jun 14, 2011
- KLA-Tencor Corp.
- Bo Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor processing module with integrated feedback/feed forwa...
- Patent number 6,625,497
- Issue date Sep 23, 2003
- Applied Materials Inc.
- Kevin P. Fairbairn
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Target acquisition technique for CD measurement machine
- Patent number 6,608,920
- Issue date Aug 19, 2003
- Applied Materials, Inc.
- Bo Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photolithography monitoring using a golden image
- Patent number 6,546,125
- Issue date Apr 8, 2003
- Applied Materials, Inc.
- Bo Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated critical dimension control for semiconductor device manu...
- Patent number 6,486,492
- Issue date Nov 26, 2002
- Applied Materials, Inc.
- Bo Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic field sampling for CD measurement
- Patent number 6,456,736
- Issue date Sep 24, 2002
- Applied Materials, Inc.
- Bo Su
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process inspection using full and segment waveform matching
- Patent number 6,421,457
- Issue date Jul 16, 2002
- Applied Materials, Inc.
- Bo Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated critical dimension control for semiconductor device manu...
- Patent number 6,388,253
- Issue date May 14, 2002
- Applied Materials, Inc.
- Bo Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated critical dimension control for semiconductor device manu...
- Patent number 6,150,664
- Issue date Nov 21, 2000
- Applied Materials, Inc.
- Bo Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DESIGNED-BASED YIELD MANAGEMENT SYSTEM
- Publication number 20120259574
- Publication date Oct 11, 2012
- Chenmin Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPUTER-IMPLEMENTED METHODS, SYSTEMS, AND COMPUTER-READABLE MEDIA...
- Publication number 20090024967
- Publication date Jan 22, 2009
- Bo Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPUTER-IMPLEMENTED METHODS AND SYSTEMS FOR DETERMINING DIFFERENT...
- Publication number 20080072207
- Publication date Mar 20, 2008
- Gaurav Verma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor processing module with integrated feedback/feed forwa...
- Publication number 20030106642
- Publication date Jun 12, 2003
- Applied Materials, Inc.
- Kevin P. Fairbairn
- G05 - CONTROLLING REGULATING
Information Patent Application
Integrated critical dimension control for semiconductor device manu...
- Publication number 20030015699
- Publication date Jan 23, 2003
- Applied Materials, Inc.
- Bo Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing module with integrated feedback/feed forwa...
- Publication number 20020155629
- Publication date Oct 24, 2002
- Kevin P. Fairbairn
- G05 - CONTROLLING REGULATING

Person

Patents Grantslast 30 patents

Computer-implemented methods and systems for determining different...

Computer-implemented methods, systems, and computer-readable media...

Semiconductor processing module with integrated feedback/feed forwa...

Target acquisition technique for CD measurement machine

Photolithography monitoring using a golden image

Integrated critical dimension control for semiconductor device manu...

Automatic field sampling for CD measurement

Process inspection using full and segment waveform matching

Integrated critical dimension control for semiconductor device manu...

Integrated critical dimension control for semiconductor device manu...

Patents Applicationslast 30 patents

DESIGNED-BASED YIELD MANAGEMENT SYSTEM

COMPUTER-IMPLEMENTED METHODS, SYSTEMS, AND COMPUTER-READABLE MEDIA...

COMPUTER-IMPLEMENTED METHODS AND SYSTEMS FOR DETERMINING DIFFERENT...

Semiconductor processing module with integrated feedback/feed forwa...

Integrated critical dimension control for semiconductor device manu...

Semiconductor processing module with integrated feedback/feed forwa...