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Hsinchu City, TW
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last 30 patents
Information
Patent Grant
Method for etching etch layer
Patent number
11,784,065
Issue date
Oct 10, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Manish Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrically pumped photonic-crystal surface-emitting laser
Patent number
11,509,115
Issue date
Nov 22, 2022
Phosertek Corporation
Chien-Hung Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching etch layer and wafer etching apparatus
Patent number
10,283,384
Issue date
May 7, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Manish Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning method for semiconductor device fabrication
Patent number
10,005,990
Issue date
Jun 26, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming-Hsi Yeh
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Cleaning composition and method for semiconductor device fabrication
Patent number
9,881,816
Issue date
Jan 30, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Wen Li
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Multi-cycle wafer cleaning method
Patent number
9,687,885
Issue date
Jun 27, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Ying-Jie Cai
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR ETCHING ETCH LAYER
Publication number
20230377912
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Manish Kumar SINGH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET BENCH PROCESS WITH IN-SITU PRE-TREATMENT OPERATION
Publication number
20230369056
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Wei CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DEVICE AND METHOD OF MANUFACTURING THE SAME
Publication number
20230361531
Publication date
Nov 9, 2023
PHOSERTEK CORPORATION
Yu-Chen Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230062572
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Wei CHANG
B08 - CLEANING
Information
Patent Application
SURFACE-EMITTING LASER
Publication number
20220224081
Publication date
Jul 14, 2022
PHOSERTEK CORPORATION
Chien-Ping Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DEVICE AND METHOD OF MANUFACTURING THE SAME
Publication number
20210344165
Publication date
Nov 4, 2021
PHOSERTEK CORPORATION
YU-CHEN CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRICALLY PUMPED PHOTONIC-CRYSTAL SURFACE-EMITTING LASER
Publication number
20210344169
Publication date
Nov 4, 2021
PHOSERTEK CORPORATION
CHIEN-HUNG LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ETCHING ETCH LAYER
Publication number
20190259636
Publication date
Aug 22, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Manish Kumar SINGH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CYCLE WAFER CLEANING METHOD
Publication number
20170014871
Publication date
Jan 19, 2017
Taiwan Semiconductor Manufacturing Co., LTD
Ying-Jie CAI
B08 - CLEANING
Information
Patent Application
METHOD FOR ETCHING ETCH LAYER AND WAFER ETCHING APPARATUS
Publication number
20160314994
Publication date
Oct 27, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Manish Kumar SINGH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD FOR SEMICONDUCTOR DEVICE FABRICATION
Publication number
20150000704
Publication date
Jan 1, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming-Hsi Yeh
B08 - CLEANING
Information
Patent Application
CLEANING COMPOSITION AND METHOD FOR SEMICONDUCTOR DEVICE FABRICATION
Publication number
20140216499
Publication date
Aug 7, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Wen Li
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...