Bo Xie

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
RF pulsing assisted low-k film deposition with high mechanical stre...
- Patent number 12,125,675
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Ruitong Xiong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single precursor low-k film deposition and UV cure for advanced tec...
- Patent number 12,119,223
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for depositing low-k dielectric films
- Patent number 11,967,498
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for seamless gap filling of dielectric material
- Patent number 11,830,728
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Chengyu Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for forming UV-cured low-κ dielectric films
- Patent number 11,621,162
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for depositing low-κdielectric films
- Patent number 11,600,486
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for cleaning low-k deposition chambers
- Patent number 11,572,622
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Bo Xie
- B08 - CLEANING
Information Patent Grant
Low-k dielectric with self-forming barrier layer
- Patent number 11,289,369
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Yi Ding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UV assisted silylation for porous low-k film sealing
- Patent number 10,113,234
- Issue date Oct 30, 2018
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and hardware for cleaning UV chambers
- Patent number 9,506,145
- Issue date Nov 29, 2016
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-layer dielectric stack for plasma damage protection
- Patent number 9,391,024
- Issue date Jul 12, 2016
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and hardware for cleaning UV chambers
- Patent number 9,364,871
- Issue date Jun 14, 2016
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
UV-assisted photochemical vapor deposition for damaged low K films...
- Patent number 9,058,980
- Issue date Jun 16, 2015
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulse method of oxidizing sidewall dielectrics for high capacitance...
- Patent number 8,664,061
- Issue date Mar 4, 2014
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for UV based silylation chamber clean
- Patent number 8,657,961
- Issue date Feb 25, 2014
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
UV assisted silylation for recovery and pore sealing of damaged low...
- Patent number 8,492,170
- Issue date Jul 23, 2013
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectronic structure including a low k dielectric and a method...
- Patent number 8,349,746
- Issue date Jan 8, 2013
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric recovery of plasma damaged low-k films by UV-assisted ph...
- Patent number 8,216,861
- Issue date Jul 10, 2012
- Applied Materials, Inc.
- Kang Sub Yim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Frontside structure damage protected megasonics clean
- Patent number 7,682,457
- Issue date Mar 23, 2010
- Applied Materials, Inc.
- Zhiyong Li
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...
- Publication number 20250054749
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Kent Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POST DEVELOPMENT TREATMENT FOR METAL-OXIDE PHOTORESISTS
- Publication number 20250053086
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- MADHUR SACHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVING MECHANICAL STRENGTH OF LOW DIELEC...
- Publication number 20240420953
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Rui Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH INCREASED ETCH...
- Publication number 20240387167
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Shanshan Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS
- Publication number 20240363337
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Muthukumar Kaliappan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING DIELECTRIC FILMS WITH INCREASED STABILITY
- Publication number 20240332005
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Wenhui Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20240290611
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20240087880
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Shruba Gangopadhyay
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20240087881
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Michael Haverty
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS
- Publication number 20240071817
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Ruitong Xiong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Single Precursor Low-K Film Deposition and UV Cure for Advanced Tec...
- Publication number 20230142684
- Publication date May 11, 2023
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SEAMLESS GAP FILLING OF DIELECTRIC MATERIAL
- Publication number 20230113965
- Publication date Apr 13, 2023
- Chengyu LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...
- Publication number 20230094012
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Ruitong Xiong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR FORMING UV-CURED LOW-K DIELECTRIC FILMS
- Publication number 20220108884
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20220084815
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CLEANING LOW-K DEPOSITION CHAMBERS
- Publication number 20220081765
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Bo Xie
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20210407792
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low-K Dielectric With Self-Forming Barrier Layer
- Publication number 20200388532
- Publication date Dec 10, 2020
- Applied Materials, Inc.
- Yi Ding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARCING TEST VEHICLE AND METHOD OF USE THEREOF
- Publication number 20200105626
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- MINGDONG LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-UV HIGH HARDNESS LOW K FILM DEPOSITION
- Publication number 20200075321
- Publication date Mar 5, 2020
- Applied Materials, Inc.
- Shaunak MUKHERJEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND HARDWARE FOR CLEANING UV CHAMBERS
- Publication number 20160296981
- Publication date Oct 13, 2016
- Applied Materials, Inc.
- Sanjeev BALUJA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER DIELECTRIC STACK FOR PLASMA DAMAGE PROTECTION
- Publication number 20160111373
- Publication date Apr 21, 2016
- Applied Materials, Inc.
- Bo XIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV ASSISTED SILYLATION FOR POROUS LOW-K FILM SEALING
- Publication number 20160017492
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Bo XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UV-ASSISTED PHOTOCHEMICAL VAPOR DEPOSITION FOR DAMAGED LOW K FILMS...
- Publication number 20150162189
- Publication date Jun 11, 2015
- Applied Materials, Inc.
- Bo XIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO DETECT VALVE DEVIATION
- Publication number 20140261703
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Daemian RAJ
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
METHOD AND HARDWARE FOR CLEANING UV CHAMBERS
- Publication number 20140053866
- Publication date Feb 27, 2014
- Applied Materials, Inc.
- Sanjeev BALUJA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR UV BASED SILYLATION CHAMBER CLEAN
- Publication number 20130284204
- Publication date Oct 31, 2013
- BO XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SEASONING UV CHAMBER OPTICAL COMPONENTS TO AVOID DEGRADA...
- Publication number 20130177706
- Publication date Jul 11, 2013
- Sanjeev Baluja
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
UV ASSISTED SILYLATION FOR RECOVERY AND PORE SEALING OF DAMAGED LOW...
- Publication number 20120270339
- Publication date Oct 25, 2012
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSE METHOD OF OXIDIZING SIDEWALL DIELECTRICS FOR HIGH CAPACITANCE...
- Publication number 20120187534
- Publication date Jul 26, 2012
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

RF pulsing assisted low-k film deposition with high mechanical stre...

Single precursor low-k film deposition and UV cure for advanced tec...

Systems and methods for depositing low-k dielectric films

Methods for seamless gap filling of dielectric material

Systems and methods for forming UV-cured low-κ dielectric films

Systems and methods for depositing low-κdielectric films

Systems and methods for cleaning low-k deposition chambers

Low-k dielectric with self-forming barrier layer

UV assisted silylation for porous low-k film sealing

Method and hardware for cleaning UV chambers

Multi-layer dielectric stack for plasma damage protection

Method and hardware for cleaning UV chambers

UV-assisted photochemical vapor deposition for damaged low K films...

Pulse method of oxidizing sidewall dielectrics for high capacitance...

Method for UV based silylation chamber clean

UV assisted silylation for recovery and pore sealing of damaged low...

Microelectronic structure including a low k dielectric and a method...

Dielectric recovery of plasma damaged low-k films by UV-assisted ph...

Frontside structure damage protected megasonics clean

Patents Applicationslast 30 patents

RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...

POST DEVELOPMENT TREATMENT FOR METAL-OXIDE PHOTORESISTS

SYSTEMS AND METHODS FOR IMPROVING MECHANICAL STRENGTH OF LOW DIELEC...

METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH INCREASED ETCH...

METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS

METHODS FOR DEPOSITING DIELECTRIC FILMS WITH INCREASED STABILITY

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS

Single Precursor Low-K Film Deposition and UV Cure for Advanced Tec...

METHODS FOR SEAMLESS GAP FILLING OF DIELECTRIC MATERIAL

RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...

SYSTEMS AND METHODS FOR FORMING UV-CURED LOW-K DIELECTRIC FILMS

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

SYSTEMS AND METHODS FOR CLEANING LOW-K DEPOSITION CHAMBERS

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

Low-K Dielectric With Self-Forming Barrier Layer

ARCING TEST VEHICLE AND METHOD OF USE THEREOF

NON-UV HIGH HARDNESS LOW K FILM DEPOSITION

METHOD AND HARDWARE FOR CLEANING UV CHAMBERS

MULTI-LAYER DIELECTRIC STACK FOR PLASMA DAMAGE PROTECTION

UV ASSISTED SILYLATION FOR POROUS LOW-K FILM SEALING

UV-ASSISTED PHOTOCHEMICAL VAPOR DEPOSITION FOR DAMAGED LOW K FILMS...

METHOD TO DETECT VALVE DEVIATION

METHOD AND HARDWARE FOR CLEANING UV CHAMBERS

METHOD FOR UV BASED SILYLATION CHAMBER CLEAN

METHOD FOR SEASONING UV CHAMBER OPTICAL COMPONENTS TO AVOID DEGRADA...

UV ASSISTED SILYLATION FOR RECOVERY AND PORE SEALING OF DAMAGED LOW...

PULSE METHOD OF OXIDIZING SIDEWALL DIELECTRICS FOR HIGH CAPACITANCE...