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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for monitoring a metal layer during chemical mechanical p...
- Patent number 6,878,036
- Issue date Apr 12, 2005
- Applied Materials, Inc.
- Hiroji Hanawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for monitoring a metal layer during chemical mechanical p...
- Publication number 20030216105
- Publication date Nov 20, 2003
- APPLIED MATERIALS, INC.
- Hiroji Hanawa
- B24 - GRINDING POLISHING