Bok Hoen KIM

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ultra-high modulus and etch selectivity boron-carbon hardmask films
- Patent number 12,211,694
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultra-high modulus and etch selectivity boron-carbon hardmask films
- Patent number 11,728,168
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,613,812
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced chemical vapor deposition of films for improved ver...
- Patent number 11,365,476
- Issue date Jun 21, 2022
- Applied Materials, Inc.
- Praket P. Jha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing using multiple radio frequency power feeds for im...
- Patent number 11,276,562
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultra-high modulus and etch selectivity boron carbon hardmask films
- Patent number 10,971,364
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 10,793,954
- Issue date Oct 6, 2020
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aluminum fluoride mitigation by plasma treatment
- Patent number 10,688,538
- Issue date Jun 23, 2020
- Applied Materials, Inc.
- Vivek Bharat Shah
- B08 - CLEANING
Information Patent Grant
Plasma processing using multiple radio frequency power feeds for im...
- Patent number 10,580,623
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of dry stripping boron-carbon films
- Patent number 10,510,518
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
VNAND tensile thick TEOS oxide
- Patent number 10,483,282
- Issue date Nov 19, 2019
- Applied Materials, Inc.
- Michael Wenyoung Tsiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric-metal stack for 3D flash memory application
- Patent number 10,475,644
- Issue date Nov 12, 2019
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-high modulus and etch selectivity boron-carbon hardmask films
- Patent number 10,418,243
- Issue date Sep 17, 2019
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of processing wafers with compressive or tensi...
- Patent number 10,403,535
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Zheng John Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas flow profile modulated control of overlay in plasma CVD films
- Patent number 10,373,822
- Issue date Aug 6, 2019
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature electrostatic chucking with dielectric constant en...
- Patent number 10,325,800
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Prashant Kulshreshtha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-channel showerhead for formation of film stacks
- Patent number 10,276,353
- Issue date Apr 30, 2019
- Applied Materials, Inc.
- Kaushik Alayavalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced chemical vapor deposition of films for improved ver...
- Patent number 10,246,772
- Issue date Apr 2, 2019
- Applied Materials, Inc.
- Praket P. Jha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal amorphous carbon for spacer and spacer protection applica...
- Patent number 10,236,182
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Sungjin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
VNAND tensile thick TEOS oxide
- Patent number 10,199,388
- Issue date Feb 5, 2019
- APPLIED MATEERIALS, INC.
- Michael Wenyoung Tsiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Edge hump reduction faceplate by plasma modulation
- Patent number 10,100,408
- Issue date Oct 16, 2018
- Applied Materials, Inc.
- Sungwon Ha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-conformal carbon film deposition
- Patent number 10,074,534
- Issue date Sep 11, 2018
- Applied Materials, Inc.
- Swayambhu P. Behera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 10,060,032
- Issue date Aug 28, 2018
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus and process
- Patent number 10,030,306
- Issue date Jul 24, 2018
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal strippable carbon film for line-edge-roughness reduction...
- Patent number 10,014,174
- Issue date Jul 3, 2018
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric-metal stack for 3D flash memory application
- Patent number 9,972,487
- Issue date May 15, 2018
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas flow profile modulated control of overlay in plasma CVD films
- Patent number 9,837,265
- Issue date Dec 5, 2017
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 9,816,187
- Issue date Nov 14, 2017
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultra-conformal carbon film deposition
- Patent number 9,721,784
- Issue date Aug 1, 2017
- Applied Materials, Inc.
- Swayambhu P. Behera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS
- Publication number 20230317455
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20230193466
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS
- Publication number 20210225650
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD PROCESS
- Publication number 20200399756
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING USING MULTIPLE RADIO FREQUENCY POWER FEEDS FOR IM...
- Publication number 20200203132
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE ELECTROSTATIC CHUCKING WITH DIELECTRIC CONSTANT EN...
- Publication number 20190355609
- Publication date Nov 21, 2019
- Applied Materials, Inc.
- Prashant KULSHRESHTHA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VNAND TENSILE THICK TEOS OXIDE
- Publication number 20190229128
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Michael Wenyoung TSIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF FILMS FOR IMPROVED VER...
- Publication number 20190185996
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Praket P. JHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS
- Publication number 20190122889
- Publication date Apr 25, 2019
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20180258535
- Publication date Sep 13, 2018
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC-METAL STACK FOR 3D FLASH MEMORY APPLICATION
- Publication number 20180247808
- Publication date Aug 30, 2018
- Applied Materials, Inc.
- Xinhai HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
- Publication number 20180096843
- Publication date Apr 5, 2018
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20180066364
- Publication date Mar 8, 2018
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM FLUORIDE MITIGATION BY PLASMA TREATMENT
- Publication number 20180036775
- Publication date Feb 8, 2018
- Applied Materials, Inc.
- Vivek Bharat SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-CONFORMAL CARBON FILM DEPOSITION
- Publication number 20170301537
- Publication date Oct 19, 2017
- Applied Materials, Inc.
- Swayambhu P. BEHERA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL STRIPPABLE CARBON FILM FOR LINE-EDGE-ROUGHNESS REDUCTION...
- Publication number 20170278709
- Publication date Sep 28, 2017
- Applied Materials, Inc.
- Bencherki MEBARKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL AMORPHOUS CARBON FOR SPACER AND SPACER PROTECTION APPLICA...
- Publication number 20170170015
- Publication date Jun 15, 2017
- Applied Materials, Inc.
- Sungjin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLAMPING AND DECLAMPING SUBSTRATES USING E...
- Publication number 20170162417
- Publication date Jun 8, 2017
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS
- Publication number 20170103893
- Publication date Apr 13, 2017
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE CONFORMAL DEPOSITION OF SILICON NITRIDE ON HIGH ASP...
- Publication number 20170084448
- Publication date Mar 23, 2017
- Applied Materials, Inc.
- Soumendra Narayan BARMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VNAND TENSILE THICK TEOS OXIDE
- Publication number 20170062469
- Publication date Mar 2, 2017
- Applied Materials, Inc.
- Michael Wenyoung TSIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO IMPROVE IN-FILM PARTICLE PERFORMANCE OF AMORPHOUS BORON-...
- Publication number 20170062218
- Publication date Mar 2, 2017
- Applied Materials, Inc.
- Ziqing DUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20170016118
- Publication date Jan 19, 2017
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL STRIPPABLE CARBON FILM FOR LINE-EDGE-ROUGHNESS REDUCTION...
- Publication number 20160365248
- Publication date Dec 15, 2016
- Applied Materials, Inc.
- Bencherki MEBARKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL-CHANNEL SHOWERHEAD FOR FORMATION OF FILM STACKS
- Publication number 20160322200
- Publication date Nov 3, 2016
- Applied Materials, Inc.
- Kaushik ALAYAVALLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
- Publication number 20160307752
- Publication date Oct 20, 2016
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF FILMS FOR IMPROVED VER...
- Publication number 20160293609
- Publication date Oct 6, 2016
- Applied Materials, Inc.
- Praket P. JHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADHESION IMPROVEMENTS FOR OXIDE-SILICON STACK
- Publication number 20160260602
- Publication date Sep 8, 2016
- Applied Materials, Inc.
- Subbalakshmi SREEKALA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE STACK MATERIALS FOR SEMICONDUCTOR APPLICATIONS FOR LITHOGRAPHI...
- Publication number 20160203971
- Publication date Jul 14, 2016
- Applied Materials, Inc.
- Michael TSIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF DRY STRIPPING BORON-CARBON FILMS
- Publication number 20160133443
- Publication date May 12, 2016
- Applied Materials, Inc.
- Kwangduk Douglas LEE
- B08 - CLEANING

Bok Hoen KIM

Person

Patents Grantslast 30 patents

Ultra-high modulus and etch selectivity boron-carbon hardmask films

PECVD process

Ultra-high modulus and etch selectivity boron-carbon hardmask films

PECVD process

Plasma enhanced chemical vapor deposition of films for improved ver...

Plasma processing using multiple radio frequency power feeds for im...

Ultra-high modulus and etch selectivity boron carbon hardmask films

PECVD process

Aluminum fluoride mitigation by plasma treatment

Plasma processing using multiple radio frequency power feeds for im...

Methods of dry stripping boron-carbon films

VNAND tensile thick TEOS oxide

Dielectric-metal stack for 3D flash memory application

Ultra-high modulus and etch selectivity boron-carbon hardmask films

Method and apparatus of processing wafers with compressive or tensi...

Gas flow profile modulated control of overlay in plasma CVD films

High temperature electrostatic chucking with dielectric constant en...

Dual-channel showerhead for formation of film stacks

Plasma enhanced chemical vapor deposition of films for improved ver...

Conformal amorphous carbon for spacer and spacer protection applica...

VNAND tensile thick TEOS oxide

Edge hump reduction faceplate by plasma modulation

Ultra-conformal carbon film deposition

PECVD process

PECVD apparatus and process

Conformal strippable carbon film for line-edge-roughness reduction...

Dielectric-metal stack for 3D flash memory application

Gas flow profile modulated control of overlay in plasma CVD films

PECVD process

Ultra-conformal carbon film deposition

Patents Applicationslast 30 patents

ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS

PECVD PROCESS

ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS

PECVD PROCESS

PLASMA PROCESSING USING MULTIPLE RADIO FREQUENCY POWER FEEDS FOR IM...

HIGH TEMPERATURE ELECTROSTATIC CHUCKING WITH DIELECTRIC CONSTANT EN...

VNAND TENSILE THICK TEOS OXIDE

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF FILMS FOR IMPROVED VER...

ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS

PECVD PROCESS

DIELECTRIC-METAL STACK FOR 3D FLASH MEMORY APPLICATION

GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS

PECVD PROCESS

ALUMINUM FLUORIDE MITIGATION BY PLASMA TREATMENT

ULTRA-CONFORMAL CARBON FILM DEPOSITION

CONFORMAL STRIPPABLE CARBON FILM FOR LINE-EDGE-ROUGHNESS REDUCTION...

CONFORMAL AMORPHOUS CARBON FOR SPACER AND SPACER PROTECTION APPLICA...

METHOD AND APPARATUS FOR CLAMPING AND DECLAMPING SUBSTRATES USING E...

ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS

LOW TEMPERATURE CONFORMAL DEPOSITION OF SILICON NITRIDE ON HIGH ASP...

VNAND TENSILE THICK TEOS OXIDE

METHODS TO IMPROVE IN-FILM PARTICLE PERFORMANCE OF AMORPHOUS BORON-...

PECVD PROCESS

CONFORMAL STRIPPABLE CARBON FILM FOR LINE-EDGE-ROUGHNESS REDUCTION...

DUAL-CHANNEL SHOWERHEAD FOR FORMATION OF FILM STACKS

GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF FILMS FOR IMPROVED VER...

ADHESION IMPROVEMENTS FOR OXIDE-SILICON STACK

GATE STACK MATERIALS FOR SEMICONDUCTOR APPLICATIONS FOR LITHOGRAPHI...

METHODS OF DRY STRIPPING BORON-CARBON FILMS