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Bon-Woong Koo

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  • Andover, MA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    TOROIDAL MOTION ENHANCED ION SOURCE
    • Publication number 20230187165
    • Publication date Jun 15, 2023
    • Applied Materials, Inc.
    • June Young Kim
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Model-Based Controlled Load Lock Pumping Scheme
    • Publication number 20230138326
    • Publication date May 4, 2023
    • Applied Materials, Inc.
    • D. Jeffrey Lischer
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Variable Thickness Ion Source Extraction Plate
    • Publication number 20230080083
    • Publication date Mar 16, 2023
    • Applied Materials, Inc.
    • Alexandre Likhanskii
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PARTICLE YIELD VIA BEAM-LINE PRESSURE CONTROL
    • Publication number 20220037114
    • Publication date Feb 3, 2022
    • Applied Materials, Inc.
    • Thomas Stacy
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE
    • Publication number 20210383995
    • Publication date Dec 9, 2021
    • Applied Materials, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE
    • Publication number 20210287872
    • Publication date Sep 16, 2021
    • Applied Materials, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ion Source With Biased Extraction Plate
    • Publication number 20210134569
    • Publication date May 6, 2021
    • Applied Materials, Inc.
    • Svetlana B. Radovanov
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GeH4/Ar Plasma Chemistry For Ion Implant Productivity Enhancement
    • Publication number 20210005416
    • Publication date Jan 7, 2021
    • Applied Materials, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION SOURCE WITH TUBULAR CATHODE
    • Publication number 20200343071
    • Publication date Oct 29, 2020
    • Applied Materials, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ion Source With Biased Extraction Plate
    • Publication number 20200294750
    • Publication date Sep 17, 2020
    • Applied Materials, Inc.
    • Svetlana B. Radovanov
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dual Cathode Ion Source
    • Publication number 20200294765
    • Publication date Sep 17, 2020
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GeH4/Ar Plasma Chemistry For Ion Implant Productivity Enhancement
    • Publication number 20200144018
    • Publication date May 7, 2020
    • Applied Materials, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dual Cathode Ion Source
    • Publication number 20190385811
    • Publication date Dec 19, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ion Beam Quality Control Using A Movable Mass Resolving Device
    • Publication number 20190198292
    • Publication date Jun 27, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method Of Improving Ion Beam Quality In an Implant System
    • Publication number 20190027341
    • Publication date Jan 24, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • John W. Graff
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Dual Cathode Ion Source
    • Publication number 20180211808
    • Publication date Jul 26, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    High Brightness Ion Beam Extraction
    • Publication number 20180166250
    • Publication date Jun 14, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RF ION SOURCE WITH DYNAMIC VOLUME CONTROL
    • Publication number 20180138020
    • Publication date May 17, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Boron Implanting Using A Co-Gas
    • Publication number 20180122618
    • Publication date May 3, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Temperature Controlled Ion Source
    • Publication number 20180090297
    • Publication date Mar 29, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Scott C. Holden
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Imp...
    • Publication number 20180087148
    • Publication date Mar 29, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Boron Implanting Using A Co-Gas
    • Publication number 20180068830
    • Publication date Mar 8, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Imp...
    • Publication number 20170247791
    • Publication date Aug 31, 2017
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Temperature Controlled Ion Source
    • Publication number 20170178857
    • Publication date Jun 22, 2017
    • Varian Semiconductor Equipment Associates, Inc.
    • Scott C. Holden
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method Of Improving Ion Beam Quality In An Implant System
    • Publication number 20170062182
    • Publication date Mar 2, 2017
    • Varian Semiconductor Equipment Associates, Inc.
    • John W. Graff
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    High Brightness Ion Beam Extraction
    • Publication number 20170032927
    • Publication date Feb 2, 2017
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Boron Implanting Using A Co-Gas
    • Publication number 20160163509
    • Publication date Jun 9, 2016
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Boron Implanting Using A Co-Gas
    • Publication number 20160163510
    • Publication date Jun 9, 2016
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ion Beam Uniformity Control
    • Publication number 20160111241
    • Publication date Apr 21, 2016
    • Varian Semiconductor Equipment Associates, Inc.
    • Alexandre Likhanskii
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Imp...
    • Publication number 20150354056
    • Publication date Dec 10, 2015
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...