Bongseong KIM

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Miyagi, JP

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Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20210358716
- Publication date Nov 18, 2021
- TOKYO ELECTRON LIMITED
- Bongseong KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20210358717
- Publication date Nov 18, 2021
- TOKYO ELECTRON LIMITED
- Bongseong KIM
- H01 - BASIC ELECTRIC ELEMENTS