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Bongsu Cho
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Asan-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus having chamber cover
Patent number
11,813,716
Issue date
Nov 14, 2023
Samsung Electronics Co., Ltd.
Jwahyeon Kim
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate transfer apparatus and substrate transfer system using th...
Patent number
11,450,549
Issue date
Sep 20, 2022
Samsung Electronics Co., Ltd.
Heeseok Nho
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS HAVING CHAMBER COVER
Publication number
20230017080
Publication date
Jan 19, 2023
Samsung Electronics Co., Ltd.
Jwahyeon KIM
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER SYSTEM USING TH...
Publication number
20210202292
Publication date
Jul 1, 2021
Samsung Electronics Co., Ltd.
Heeseok Nho
H01 - BASIC ELECTRIC ELEMENTS