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Zoetermeer, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Measurement system, lithographic apparatus and device manufacturing...
Patent number
11,009,800
Issue date
May 18, 2021
ASML Netherlands B.V.
Han-Kwang Nienhuys
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Beam delivery apparatus and method
Patent number
10,580,545
Issue date
Mar 3, 2020
ASML Netherlands B.V.
Vadim Yevgenyevich Banine
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
High resolution broadband monolithic spectrometer and method
Patent number
10,508,951
Issue date
Dec 17, 2019
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Borgert Kruizinga
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic method
Patent number
9,823,572
Issue date
Nov 21, 2017
ASML Netherlands B.V.
Andrey Alexandrovich Nikipelov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Depolarizer, telescope and remote sensing device and method
Patent number
9,383,490
Issue date
Jul 5, 2016
Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
Borgert Kruizinga
G01 - MEASURING TESTING
Information
Patent Grant
Anamorphotic telescope
Patent number
9,304,300
Issue date
Apr 5, 2016
Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
Huibert Visser
G02 - OPTICS
Information
Patent Grant
Illumination system for use in a stereolithography apparatus
Patent number
8,873,024
Issue date
Oct 28, 2014
Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
Jacobus Hubertus Theodoor Jamar
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Illumination system for use in a stereolithography apparatus
Patent number
8,836,916
Issue date
Sep 16, 2014
Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
Jacobus Hubertus Theodoor Jamar
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
SLM calibration
Patent number
8,717,535
Issue date
May 6, 2014
ASML Netherlands B.V.
Huibert Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and sensor therefor
Patent number
8,629,418
Issue date
Jan 14, 2014
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Grating for EUV-radiation, method for manufacturing the grating and...
Patent number
8,559,108
Issue date
Oct 15, 2013
ASML Netherlands B.V.
Borgert Kruizinga
G02 - OPTICS
Information
Patent Grant
Liquid filled lens element, lithographic apparatus comprising such...
Patent number
8,237,912
Issue date
Aug 7, 2012
ASML Netherlands B.V.
Herman Boom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Liquid filled lens element, lithographic apparatus comprising such...
Patent number
7,969,549
Issue date
Jun 28, 2011
ASML Netherlands B.V.
Herman Boom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor for use in a lithographic apparatus
Patent number
7,453,078
Issue date
Nov 18, 2008
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor for use in a lithographic apparatus
Patent number
7,282,701
Issue date
Oct 16, 2007
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging apparatus
Patent number
7,023,525
Issue date
Apr 4, 2006
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging apparatus
Patent number
6,778,257
Issue date
Aug 17, 2004
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system for shaping extreme ultraviolet radiation used...
Patent number
6,498,351
Issue date
Dec 24, 2002
ASML Netherlands B.V.
Borgert Kruizinga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
Publication number
20200379360
Publication date
Dec 3, 2020
ASML NETHERLANDS B.V.
Han-Kwang Nienhuys
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH RESOLUTION BROADBAND MONOLITHIC SPECTROMETER AND METHOD
Publication number
20190017869
Publication date
Jan 17, 2019
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Borgert KRUIZINGA
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC METHOD
Publication number
20180081278
Publication date
Mar 22, 2018
ASML NETHERLANDS B.V.
Andrey Alexandrovich NIKIPELOV
G01 - MEASURING TESTING
Information
Patent Application
RADIATION SYSTEM
Publication number
20180031982
Publication date
Feb 1, 2018
ASML NETHERLANDS B.V.
Han-Kwang NIENHUYS
G02 - OPTICS
Information
Patent Application
BEAM DELIVERY APPARATUS AND METHOD
Publication number
20160225477
Publication date
Aug 4, 2016
ASML NETHERLANDS B.V.
Vadim Yevgenyevich BANINE
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
LITHOGRAPHIC METHOD
Publication number
20160147161
Publication date
May 26, 2016
ASML NETHERLANDS B.V.
Andrey Alexandrovich NIKIPELOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEPOLARIZER, TELESCOPE AND REMOTE SENSING DEVICE AND METHOD
Publication number
20140320852
Publication date
Oct 30, 2014
Borgert Kruizinga
G02 - OPTICS
Information
Patent Application
Illumination System for Use in a Stereolithography Apparatus
Publication number
20120063131
Publication date
Mar 15, 2012
Jacobus Hubertus Theodoor Jamar
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Illumination System for Use in a Stereolithography Apparatus
Publication number
20120057143
Publication date
Mar 8, 2012
DSM IP Assets B. V.
Jacobus Hubertus Theodoor Jamar
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
LIQUID FILLED LENS ELEMENT, LITHOGRAPHIC APPARATUS COMPRISING SUCH...
Publication number
20110194096
Publication date
Aug 11, 2011
ASML NETHERLANDS B.V.
Herman Boom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GRATING FOR EUV-RADIATION, METHOD FOR MANUFACTURING THE GRATING AND...
Publication number
20100284064
Publication date
Nov 11, 2010
ASML NETHERLANDS B.V.
Borgert Kruizinga
G02 - OPTICS
Information
Patent Application
SLM Calibration
Publication number
20090244506
Publication date
Oct 1, 2009
ASML NETHERLANDS B.V.
Huibert Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20080007844
Publication date
Jan 10, 2008
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Liquid filled lens element, lithographic apparatus comprising such...
Publication number
20080002168
Publication date
Jan 3, 2008
ASML NETHERLANDS B.V.
Herman Boom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20070108377
Publication date
May 17, 2007
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20060192093
Publication date
Aug 31, 2006
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imaging apparatus
Publication number
20040239909
Publication date
Dec 2, 2004
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imaging apparatus
Publication number
20030030781
Publication date
Feb 13, 2003
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY