Boris Atlas

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature control system for electrostatic chucks and electrostat...
- Patent number 9,679,792
- Issue date Jun 13, 2017
- Noah Precision, LLC
- Boris Atlas
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Temperature control unit for bubblers
- Patent number 8,118,939
- Issue date Feb 21, 2012
- Noah Precision, LLC
- Boris Atlas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control apparatus and method
- Patent number 7,849,916
- Issue date Dec 14, 2010
- Noah Precision, LLC
- Boris Atlas
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor processing temperature control
- Patent number 7,180,036
- Issue date Feb 20, 2007
- Oriol, Inc.
- Boris Atlas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing temperature control
- Patent number 6,822,202
- Issue date Nov 23, 2004
- Oriol, Inc.
- Boris Atlas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Negative offset bipolar electrostatic chucks
- Patent number 5,835,333
- Issue date Nov 10, 1998
- Lam Research Corporation
- Edward Ross Castro
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Dynamic feedback electrostatic wafer chuck
- Patent number 5,812,361
- Issue date Sep 22, 1998
- Lam Research Corporation
- Phillip Lawrence Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact thermal electric heat exchanger
- Patent number 5,640,852
- Issue date Jun 24, 1997
- Boris Atlas
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...

Patents Applicationslast 30 patents

Information Patent Application
HIGH THERMAL CONDUCTIVITY WAFER SUPPORT PEDESTAL DEVICE
- Publication number 20160358761
- Publication date Dec 8, 2016
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Boris Atlas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LOOP TEMPERATURE CONTROL SYSTEM FOR A SEMICONDUCTOR MANUFACTU...
- Publication number 20150053375
- Publication date Feb 26, 2015
- Noah Precision, LLC
- Boris ATLAS
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
TEMPERATURE CONTROL SYSTEM FOR ELECTROSTATIC CHUCKS AND ELECTROSTAT...
- Publication number 20140131005
- Publication date May 15, 2014
- Noah Precision, LLC
- Boris ATLAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature control apparatus and method
- Publication number 20070178020
- Publication date Aug 2, 2007
- Boris Atlas
- G05 - CONTROLLING REGULATING
Information Patent Application
Semiconductor processing temperature control
- Publication number 20070051818
- Publication date Mar 8, 2007
- Boris Atlas
- G05 - CONTROLLING REGULATING
Information Patent Application
Multi-channel temperature control system for semiconductor processi...
- Publication number 20060237181
- Publication date Oct 26, 2006
- Boris Atlas
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Temperature control unit for bubblers
- Publication number 20060213446
- Publication date Sep 28, 2006
- Boris Atlas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Boris Atlas

Person

Patents Grantslast 30 patents

Temperature control system for electrostatic chucks and electrostat...

Temperature control unit for bubblers

Temperature control apparatus and method

Semiconductor processing temperature control

Semiconductor processing temperature control

Negative offset bipolar electrostatic chucks

Dynamic feedback electrostatic wafer chuck

Compact thermal electric heat exchanger

Patents Applicationslast 30 patents

HIGH THERMAL CONDUCTIVITY WAFER SUPPORT PEDESTAL DEVICE

MULTI-LOOP TEMPERATURE CONTROL SYSTEM FOR A SEMICONDUCTOR MANUFACTU...

TEMPERATURE CONTROL SYSTEM FOR ELECTROSTATIC CHUCKS AND ELECTROSTAT...

Temperature control apparatus and method

Semiconductor processing temperature control

Multi-channel temperature control system for semiconductor processi...

Temperature control unit for bubblers