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Boris Fuksshimov
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Slurry flow rate monitoring in chemical-mechanical polisher using p...
Patent number
6,855,031
Issue date
Feb 15, 2005
Applied Materials, Inc.
Boris Fuksshimov
B24 - GRINDING POLISHING
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Patent Grant
Combined slurry dispenser and rinse arm
Patent number
6,280,299
Issue date
Aug 28, 2001
Applied Materials, Inc.
Daniel Kennedy
B24 - GRINDING POLISHING
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Patent Grant
Combined slurry dispenser and rinse arm and method of operation
Patent number
6,139,406
Issue date
Oct 31, 2000
Applied Materials, Inc.
Daniel Kennedy
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Method and device to remove unwanted material from the edge region...
Publication number
20040132295
Publication date
Jul 8, 2004
Bulent M. Basol
B08 - CLEANING
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Patent Application
Slurry flow rate monitoring in chemical-mechanical polisher using p...
Publication number
20030166378
Publication date
Sep 4, 2003
Boris Fuksshimov
B24 - GRINDING POLISHING