Boris Grek

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Fiber-optic interferometer employing low-coherence-length light for...
- Patent number 6,507,405
- Issue date Jan 14, 2003
- Ultratech Stepper, Inc.
- Boris Grek
- G01 - MEASURING TESTING
Information Patent Grant
Acousto-optical light tunnel apparatus and method
- Patent number 6,347,176
- Issue date Feb 12, 2002
- Ultratech Stepper, Inc.
- Andrew M. Hawryluk
- G02 - OPTICS
Information Patent Grant
Method and apparatus for measuring micro structures, anisotropy and...
- Patent number 6,097,488
- Issue date Aug 1, 2000
- Princeton University
- Boris Grek
- G01 - MEASURING TESTING