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Boris Habets
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Dreseden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Process control method for lithographically processed semiconductor...
Patent number
10,739,685
Issue date
Aug 11, 2020
Qoniac GmbH
Stefan Buhl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for fabricating wafer by calculating process c...
Patent number
10,739,688
Issue date
Aug 11, 2020
Qoniac GmbH
Boris Habets
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for processing of a further layer on a semiconductor wafer
Patent number
10,699,971
Issue date
Jun 30, 2020
Qoniac GmbH
Boris Habets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for simulation of lithography overlay
Patent number
10,379,447
Issue date
Aug 13, 2019
Qoniac GmbH
Boris Habets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus of evaluating a semiconductor manufacturing pr...
Patent number
10,310,490
Issue date
Jun 4, 2019
Qoniac GmbH
Stefan Buhl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for fabricating wafer by calculating process c...
Patent number
10,295,914
Issue date
May 21, 2019
Qoniac GmbH
Boris Habets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing semiconductor devices by using sampling plans
Patent number
10,234,401
Issue date
Mar 19, 2019
QONIAC GMBH
Stefan Buhl
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for assessing the usability of an exposed and developed semi...
Patent number
10,008,422
Issue date
Jun 26, 2018
Qoniac GmbH
Boris Habets
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for fabricating wafer by calculating process c...
Patent number
9,543,223
Issue date
Jan 10, 2017
Qoniac GmbH
Boris Habets
G05 - CONTROLLING REGULATING
Information
Patent Grant
Alignment calculation
Patent number
8,440,475
Issue date
May 14, 2013
Qimonda AG
Boris Habets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods of alternative overlay calculation
Patent number
7,783,444
Issue date
Aug 24, 2010
Qimonda AG
Boris Habets
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR SIMULATION OF LITHOGRAPHY OVERLAY
Publication number
20190361354
Publication date
Nov 28, 2019
Qoniac GmbH
Boris Habets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process Control Method For Lithographically Processed Semiconductor...
Publication number
20190250516
Publication date
Aug 15, 2019
Qoniac GmbH
Stefan Buhl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for Fabricating Wafer By Calculating Process C...
Publication number
20190243255
Publication date
Aug 8, 2019
Quoniac GmbH
Boris Habets
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ASSESSING THE USABILITY OF AN EXPOSED AND DEVELOPED SEMI...
Publication number
20180342429
Publication date
Nov 29, 2018
Qoniac GmbH
Boris Habets
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES BY USING SAMPLING PLANS
Publication number
20170242425
Publication date
Aug 24, 2017
Qoniac GmbH
Stefan Buhl
G05 - CONTROLLING REGULATING
Information
Patent Application
Method and Apparatus of Evaluating a Semiconductor Manufacturing Pr...
Publication number
20170221741
Publication date
Aug 3, 2017
Qoniac GmbH
Stefan Buhl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Fabricating Wafer By Calculating Process C...
Publication number
20170075230
Publication date
Mar 16, 2017
Boris Habets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method And Apparatus For Analysis Of Processing Of A Semiconductor...
Publication number
20170053842
Publication date
Feb 23, 2017
Qoniac GmbH
Martin Roessiger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Simulation of Lithography Overlay
Publication number
20150019192
Publication date
Jan 15, 2015
Boris Habets
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR FABRICATING WAFER BY CALCULATING PROCESS C...
Publication number
20140212817
Publication date
Jul 31, 2014
Boris Habets
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Alignment Calculation
Publication number
20100030360
Publication date
Feb 4, 2010
Boris Habets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Systems and Methods of Alternative Overlay Calculation
Publication number
20090248337
Publication date
Oct 1, 2009
Boris Habets
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for determining deformations on a substrate
Publication number
20080182344
Publication date
Jul 31, 2008
Steffen Mueller
G01 - MEASURING TESTING