Boris MENCHTCHIKOV

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 11,378,893
- Issue date Jul 5, 2022
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 10,838,310
- Issue date Nov 17, 2020
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 10,254,663
- Issue date Apr 9, 2019
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic cluster system, method for calibrating a positioning d...
- Patent number 9,395,633
- Issue date Jul 19, 2016
- ASML Netherlands B.V.
- Alexander Alexandrovich Danilin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for controlling a lithographic apparatus
- Patent number 9,310,698
- Issue date Apr 12, 2016
- ASML Netherlands B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 9,268,242
- Issue date Feb 23, 2016
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 9,188,880
- Issue date Nov 17, 2015
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method for measurin...
- Patent number 9,134,625
- Issue date Sep 15, 2015
- ASML Netherlands B.V.
- Alexander Viktorovych Padiy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calibration of lithographic apparatus by exposing patterns on subst...
- Patent number 9,069,240
- Issue date Jun 30, 2015
- ASML Netherlands B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,947,630
- Issue date Feb 3, 2015
- ASML Netherlands B.V.
- Alexander Viktorovych Padiy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method controlling parameter drift by pe...
- Patent number 8,947,643
- Issue date Feb 3, 2015
- ASML Netherlands B.V.
- Alexander Viktorovych Padiy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calibration of lithographic apparatus
- Patent number 8,793,099
- Issue date Jul 29, 2014
- ASML Netherlands B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and associated...
- Patent number 8,717,536
- Issue date May 6, 2014
- ASML Netherlands B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,687,167
- Issue date Apr 1, 2014
- ASML Netherlands B.V.
- Alexander Viktorovych Padiy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method having liqui...
- Patent number 7,804,575
- Issue date Sep 28, 2010
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and arrangement for predicting thermally-induced deformation...
- Patent number 7,710,539
- Issue date May 4, 2010
- ASML Netherlands B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and arrangement for correcting thermally-induced field defor...
- Patent number 7,710,538
- Issue date May 4, 2010
- ASML Netherlands B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optimized correction of wafer thermal deformations in a lithographi...
- Patent number 7,595,496
- Issue date Sep 29, 2009
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and arrangement for correcting thermally-induced field defor...
- Patent number 7,462,429
- Issue date Dec 9, 2008
- ASML Netherlands B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and arrangement for predicting thermally-induced deformation...
- Patent number 7,462,430
- Issue date Dec 9, 2008
- ASML Netherlands B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calibration substrate and method for calibrating a lithographic app...
- Patent number 7,453,063
- Issue date Nov 18, 2008
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calibrating a lithographic apparatus and device manufactu...
- Patent number 7,426,011
- Issue date Sep 16, 2008
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 7,423,725
- Issue date Sep 9, 2008
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,304,715
- Issue date Dec 4, 2007
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optimized correction of wafer thermal deformations in a lithographi...
- Patent number 7,250,237
- Issue date Jul 31, 2007
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,196,768
- Issue date Mar 27, 2007
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20210063898
- Publication date Mar 4, 2021
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20190235397
- Publication date Aug 1, 2019
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20160048085
- Publication date Feb 18, 2016
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC CLUSTER SYSTEM, METHOD FOR CALIBRATING A POSITIONING D...
- Publication number 20150153657
- Publication date Jun 4, 2015
- Alexander Alexandrovich Danilin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120113402
- Publication date May 10, 2012
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20110216293
- Publication date Sep 8, 2011
- ASML NETHERLANDS B.V.
- Alexander Viktorovych Padiy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus, Device Manufacturing Method and Associated...
- Publication number 20110216294
- Publication date Sep 8, 2011
- ASML NETHERLANDS B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Calibration of Lithographic Apparatus
- Publication number 20110213584
- Publication date Sep 1, 2011
- ASML NETHERLANDS B.V.
- Boris MENCHTCHIKOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Controlling a Lithographic Apparatus
- Publication number 20110205510
- Publication date Aug 25, 2011
- ASML NETHERLANDS B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20110205520
- Publication date Aug 25, 2011
- ASML NETHERLANDS B.V.
- Alexander Viktorovych Padiy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20110205511
- Publication date Aug 25, 2011
- ASML NETHERLANDS B.V.
- Alexander Viktorovych Padiy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20110205513
- Publication date Aug 25, 2011
- ASML NETHERLANDS B.V.
- Alexander Viktorovych Padiy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Calibration of Lithographic Apparatus
- Publication number 20110205515
- Publication date Aug 25, 2011
- ASML NETHERLANDS B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100321650
- Publication date Dec 23, 2010
- ASML NETHERLANDS B.V.
- THEODORUS PETRUS MARIA CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND ARRANGEMENT FOR PREDICTING THERMALLY-INDUCED DEFORMATIO...
- Publication number 20090055115
- Publication date Feb 26, 2009
- ASML NETHERLANDS B.V.
- Boris MENCHTCHIKOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND ARRANGEMENT FOR CORRECTING THERMALLY-INDUCED FIELD DEFOR...
- Publication number 20090055114
- Publication date Feb 26, 2009
- ASML NETHERLANDS B.V.
- Boris MENCHTCHIKOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optimized correction of water thermal deformations in a lithographi...
- Publication number 20070257209
- Publication date Nov 8, 2007
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and arrangement for predicting thermally-induced deformation...
- Publication number 20070090853
- Publication date Apr 26, 2007
- ASML NETHERLANDS B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and arrangement for correcting thermally-induced field defor...
- Publication number 20070082280
- Publication date Apr 12, 2007
- ASML NETHERLANDS B.V.
- Boris Menchtchikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of calibrating a lithographic apparatus and device manufactu...
- Publication number 20070058152
- Publication date Mar 15, 2007
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic method
- Publication number 20070052940
- Publication date Mar 8, 2007
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Calibration substrate and method for calibrating a lithographic app...
- Publication number 20060119830
- Publication date Jun 8, 2006
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060087637
- Publication date Apr 27, 2006
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060033892
- Publication date Feb 16, 2006
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060033898
- Publication date Feb 16, 2006
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optimized correction of wafer thermal deformations in a lithographi...
- Publication number 20050136346
- Publication date Jun 23, 2005
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Boris MENCHTCHIKOV

Person

Patents Grantslast 30 patents

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method involving a...

Lithographic cluster system, method for calibrating a positioning d...

Method and apparatus for controlling a lithographic apparatus

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method for measurin...

Calibration of lithographic apparatus by exposing patterns on subst...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method controlling parameter drift by pe...

Calibration of lithographic apparatus

Lithographic apparatus, device manufacturing method and associated...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method having liqui...

Method and arrangement for predicting thermally-induced deformation...

Method and arrangement for correcting thermally-induced field defor...

Optimized correction of wafer thermal deformations in a lithographi...

Method and arrangement for correcting thermally-induced field defor...

Method and arrangement for predicting thermally-induced deformation...

Calibration substrate and method for calibrating a lithographic app...

Method of calibrating a lithographic apparatus and device manufactu...

Lithographic method

Lithographic apparatus and device manufacturing method

Optimized correction of wafer thermal deformations in a lithographi...

Lithographic apparatus and device manufacturing method

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC CLUSTER SYSTEM, METHOD FOR CALIBRATING A POSITIONING D...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic Apparatus and Device Manufacturing Method

Lithographic Apparatus, Device Manufacturing Method and Associated...

Calibration of Lithographic Apparatus

Method and Apparatus for Controlling a Lithographic Apparatus

Lithographic Apparatus and Device Manufacturing Method

Lithographic Apparatus and Device Manufacturing Method

Lithographic Apparatus and Device Manufacturing Method

Calibration of Lithographic Apparatus

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

METHOD AND ARRANGEMENT FOR PREDICTING THERMALLY-INDUCED DEFORMATIO...

METHOD AND ARRANGEMENT FOR CORRECTING THERMALLY-INDUCED FIELD DEFOR...

Optimized correction of water thermal deformations in a lithographi...

Method and arrangement for predicting thermally-induced deformation...

Method and arrangement for correcting thermally-induced field defor...

Method of calibrating a lithographic apparatus and device manufactu...

Lithographic method

Calibration substrate and method for calibrating a lithographic app...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Optimized correction of wafer thermal deformations in a lithographi...