Boxue Chen

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Soft x-ray optics with improved filtering
- Patent number 12,025,575
- Issue date Jul 2, 2024
- KLA Corporation
- Alexander Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Soft x-ray optics with improved filtering
- Patent number 11,143,604
- Issue date Oct 12, 2021
- KLA Corporation
- Alexander Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Hybrid metrology for patterned wafer characterization
- Patent number 10,712,145
- Issue date Jul 14, 2020
- KLA-Tencor Corporation
- Boxue Chen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
X-Ray Scatterometry Based Measurements Of Memory Array Structures S...
- Publication number 20240302301
- Publication date Sep 12, 2024
- KLA Corporation
- Sandeep Inampudi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Soft X-Ray Optics With Improved Filtering
- Publication number 20240288388
- Publication date Aug 29, 2024
- KLA Corporation
- Alexander Kuznetsov
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Model-less, Scatterometry Based Measurement...
- Publication number 20240085321
- Publication date Mar 14, 2024
- KLA Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For X-Ray Scatterometry Measurements Employing...
- Publication number 20240060914
- Publication date Feb 22, 2024
- KLA Corporation
- Mohsen Mahvash
- G01 - MEASURING TESTING
Information Patent Application
Soft X-Ray Optics With Improved Filtering
- Publication number 20210404979
- Publication date Dec 30, 2021
- KLA Corporation
- Alexander Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Soft X-Ray Optics With Improved Filtering
- Publication number 20210310968
- Publication date Oct 7, 2021
- KLA Corporation
- Alexander Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Hybrid Metrology For Patterned Wafer Characterization
- Publication number 20180112968
- Publication date Apr 26, 2018
- KLA-Tencor Corporation
- Boxue Chen
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Soft x-ray optics with improved filtering

Soft x-ray optics with improved filtering

Hybrid metrology for patterned wafer characterization

Patents Applicationslast 30 patents

X-Ray Scatterometry Based Measurements Of Memory Array Structures S...

Soft X-Ray Optics With Improved Filtering

Methods And Systems For Model-less, Scatterometry Based Measurement...

Methods And Systems For X-Ray Scatterometry Measurements Employing...

Soft X-Ray Optics With Improved Filtering

Soft X-Ray Optics With Improved Filtering

Hybrid Metrology For Patterned Wafer Characterization