Boyu DONG

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,362,129
- Issue date Jun 7, 2016
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20140120725
- Publication date May 1, 2014
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140083468
- Publication date Mar 27, 2014
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS