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Brad Jacobs
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East Helena, MO, US
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last 30 patents
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Patent Grant
Systems and methods for selectively etching tungsten in a downstrea...
Patent number
9,837,286
Issue date
Dec 5, 2017
Lam Research Corporation
Dengliang Yang
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SYSTEMS AND METHODS FOR SELECTIVELY ETCHING TUNGSTEN IN A DOWNSTREA...
Publication number
20170069511
Publication date
Mar 9, 2017
LAM RESEARCH CORPORATION
Dengliang Yang
H01 - BASIC ELECTRIC ELEMENTS