Brad S. Mattson

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Inductive plasma reactor
- Patent number 6,551,447
- Issue date Apr 22, 2003
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for thermal processing of a semiconductor substrate
- Patent number 6,403,925
- Issue date Jun 11, 2002
- Mattson Technology, Inc.
- Kristian E. Johnsgard
- C30 - CRYSTAL GROWTH
Information Patent Grant
System and method for thermal processing of a semiconductor substrate
- Patent number 6,399,921
- Issue date Jun 4, 2002
- Mattson Technology, Inc.
- Kristian E. Johnsgard
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for thermal processing of semiconductor substr...
- Patent number 6,355,909
- Issue date Mar 12, 2002
- Sandia Corporation
- Stewart K. Griffiths
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus and method for thermal processing of semiconductor substr...
- Patent number 6,342,691
- Issue date Jan 29, 2002
- Mattson Technology, Inc.
- Kristian E. Johnsgard
- C30 - CRYSTAL GROWTH
Information Patent Grant
System and method for thermal processing of a semiconductor substrate
- Patent number 6,172,337
- Issue date Jan 9, 2001
- Mattson Technology, Inc.
- Kristian E. Johnsgard
- C30 - CRYSTAL GROWTH
Information Patent Grant
Inductive plasma reactor
- Patent number 6,143,129
- Issue date Nov 7, 2000
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for thermal processing of semiconductor substr...
- Patent number 6,133,550
- Issue date Oct 17, 2000
- Sandia Corporation
- Stewart K. Griffiths
- C30 - CRYSTAL GROWTH
Information Patent Grant
System and method for thermal processing of a semiconductor substrate
- Patent number 6,046,439
- Issue date Apr 4, 2000
- Mattson Technology, Inc.
- Kristian E. Johnsgard
- C30 - CRYSTAL GROWTH
Information Patent Grant
System and method for thermal processing of a semiconductor substrate
- Patent number 6,043,460
- Issue date Mar 28, 2000
- Mattson Technology, Inc.
- Kristian E. Johnsgard
- C30 - CRYSTAL GROWTH
Information Patent Grant
System and method for thermal processing of a semiconductor substrate
- Patent number 6,002,109
- Issue date Dec 14, 1999
- Mattson Technology, Inc.
- Kristian E. Johnsgard
- C30 - CRYSTAL GROWTH
Information Patent Grant
Inductive plasma reactor
- Patent number 5,811,022
- Issue date Sep 22, 1998
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma contamination removal process
- Patent number 5,198,634
- Issue date Mar 30, 1993
- Brad S. Mattson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR THERMAL PROCESSING OF A SEMICONDUCTOR SUBSTRATE
- Publication number 20020047004
- Publication date Apr 25, 2002
- Kristian E. Johnsgard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Brad S. Mattson

Person

Patents Grantslast 30 patents

Inductive plasma reactor

System and method for thermal processing of a semiconductor substrate

System and method for thermal processing of a semiconductor substrate

Method and apparatus for thermal processing of semiconductor substr...

Apparatus and method for thermal processing of semiconductor substr...

System and method for thermal processing of a semiconductor substrate

Inductive plasma reactor

Method and apparatus for thermal processing of semiconductor substr...

System and method for thermal processing of a semiconductor substrate

System and method for thermal processing of a semiconductor substrate

System and method for thermal processing of a semiconductor substrate

Inductive plasma reactor

Plasma contamination removal process

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR THERMAL PROCESSING OF A SEMICONDUCTOR SUBSTRATE