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Bradley M. Mahan
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Burlington, VT, US
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Patents Grants
last 30 patents
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Patent Grant
Detection of foreign material on a substrate chuck
Patent number
9,671,323
Issue date
Jun 6, 2017
GLOBALFOUNDRIES Inc.
Robert G. Carlson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate edge clamping force tester
Patent number
9,581,532
Issue date
Feb 28, 2017
International Business Machines Corporation
John J. Bandy
G01 - MEASURING TESTING
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Patent Grant
Method and apparatus for calibrating sensors that detect wafer prot...
Patent number
9,348,057
Issue date
May 24, 2016
International Business Machines Corporation
John J. Bandy
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
DETECTION OF FOREIGN MATERIAL ON A SUBSTRATE CHUCK
Publication number
20160327462
Publication date
Nov 10, 2016
GLOBALFOUNDRIES INC.
Robert G. Carlson
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE EDGE CLAMPING FORCE TESTER
Publication number
20160161381
Publication date
Jun 9, 2016
International Business Machines Corporation
John J. Bandy
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR CALIBRATING SENSORS THAT DETECT WAFER PROT...
Publication number
20160025893
Publication date
Jan 28, 2016
International Business Machines Corporation
John J. Bandy
G01 - MEASURING TESTING