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Brent E. Burns
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Torrance, CA, US
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last 30 patents
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Patent Grant
Planar masking for multi-depth silicon etching
Patent number
5,738,757
Issue date
Apr 14, 1998
Northrop Grumman Corporation
Brent E. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micromachined accelerometer gyroscope
Patent number
5,392,650
Issue date
Feb 28, 1995
Northrop Grumman Corporation
Benedict B. O'Brien
G01 - MEASURING TESTING
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Patent Grant
Miniature silicon accelerometer and method
Patent number
5,205,171
Issue date
Apr 27, 1993
Northrop Corporation
Benedict B. O'Brien
G01 - MEASURING TESTING
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Patent Grant
Silicon spatial light modulator
Patent number
5,170,283
Issue date
Dec 8, 1992
Northrop Corporation
Benedict B. O'Brien
G02 - OPTICS