Bret Whiteside

Person

Gilroy, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Programmable and reconfigurable mask with MEMS micro-mirror array f...
- Patent number 11,366,307
- Issue date Jun 21, 2022
- KLA Corporation
- Hongxing Yuan
- G02 - OPTICS
Information Patent Grant
Systems and methods for advanced defect ablation protection
- Patent number 11,181,484
- Issue date Nov 23, 2021
- KLA Corporation
- Zhiwei Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface defect inspection with large particle monitoring and laser...
- Patent number 10,324,045
- Issue date Jun 18, 2019
- KLA-Tencor Corporation
- Steve (Yifeng) Cui
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for producing and measuring dynamically focuse...
- Patent number 10,215,712
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
TDI sensor in a darkfield system
- Patent number 9,891,177
- Issue date Feb 13, 2018
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Laser with integrated multi line or scanning beam capability
- Patent number 9,678,350
- Issue date Jun 13, 2017
- KLA-Tencor Corporation
- Christian Wolters
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Monolithic optical beam splitter with focusing lens
- Patent number 9,664,909
- Issue date May 30, 2017
- KLA-Tencor Corporation
- Bret Whiteside
- G02 - OPTICS
Information Patent Grant
Multi-spot defect inspection system
- Patent number 9,182,358
- Issue date Nov 10, 2015
- KLA-Tencor Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for producing and measuring dynamically focuss...
- Patent number 9,068,952
- Issue date Jun 30, 2015
- KLA-Tencor Corporation
- Aleksey Petrenko
- G01 - MEASURING TESTING
Information Patent Grant
Monitoring incident beam position in a wafer inspection system
- Patent number 8,934,091
- Issue date Jan 13, 2015
- KLA-Tencor Corp.
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Extending the lifetime of a deep UV laser in a wafer inspection tool
- Patent number 8,432,944
- Issue date Apr 30, 2013
- KLA-Technor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic range extension in surface inspection systems
- Patent number 8,134,698
- Issue date Mar 13, 2012
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Single-Material Waveplates for Pupil Polarization Filtering
- Publication number 20230187241
- Publication date Jun 15, 2023
- KLA Corporation
- Chong Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reflective Waveplates for Pupil Polarization Filtering
- Publication number 20230187242
- Publication date Jun 15, 2023
- KLA Corporation
- Chong Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Programmable and Reconfigurable Mask with MEMS Micro-Mirror Array f...
- Publication number 20220066195
- Publication date Mar 3, 2022
- KLA Corporation
- Hongxing Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR ROTATING AN OPTICAL OBJECTIVE
- Publication number 20210356406
- Publication date Nov 18, 2021
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DE...
- Publication number 20200132608
- Publication date Apr 30, 2020
- KLA Corporation
- Raymond Chu
- G02 - OPTICS
Information Patent Application
Surface Defect Inspection With Large Particle Monitoring And Laser...
- Publication number 20180038803
- Publication date Feb 8, 2018
- KLA-Tencor Corporation
- Steve (Yifeng) Cui
- G01 - MEASURING TESTING
Information Patent Application
TDI Sensor in a Darkfield System
- Publication number 20160097727
- Publication date Apr 7, 2016
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Producing and Measuring Dynamically Focuse...
- Publication number 20150330907
- Publication date Nov 19, 2015
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Multi-Spot Defect Inspection System
- Publication number 20140268118
- Publication date Sep 18, 2014
- KLA-Tencor Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Application
Monitoring Incident Beam Position in a Wafer Inspection System
- Publication number 20140071437
- Publication date Mar 13, 2014
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
Laser with Integrated Multi Line or Scanning Beam Capability
- Publication number 20130250385
- Publication date Sep 26, 2013
- KLA-Tencor Corporation
- Christian Wolters
- G02 - OPTICS
Information Patent Application
Extending the lifetime of a Deep UV laser in a Wafer Inspection tool
- Publication number 20110315897
- Publication date Dec 29, 2011
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G02 - OPTICS
Information Patent Application
Method and apparatus for producing and Measuring dynamically focuss...
- Publication number 20110051132
- Publication date Mar 3, 2011
- Aleksey Petrenko
- G02 - OPTICS

Bret Whiteside

Person

Patents Grantslast 30 patents

Programmable and reconfigurable mask with MEMS micro-mirror array f...

Systems and methods for advanced defect ablation protection

Surface defect inspection with large particle monitoring and laser...

Method and apparatus for producing and measuring dynamically focuse...

TDI sensor in a darkfield system

Laser with integrated multi line or scanning beam capability

Monolithic optical beam splitter with focusing lens

Multi-spot defect inspection system

Method and apparatus for producing and measuring dynamically focuss...

Monitoring incident beam position in a wafer inspection system

Extending the lifetime of a deep UV laser in a wafer inspection tool

Dynamic range extension in surface inspection systems

Patents Applicationslast 30 patents

Single-Material Waveplates for Pupil Polarization Filtering

Reflective Waveplates for Pupil Polarization Filtering

Programmable and Reconfigurable Mask with MEMS Micro-Mirror Array f...

APPARATUS AND METHOD FOR ROTATING AN OPTICAL OBJECTIVE

SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DE...

Surface Defect Inspection With Large Particle Monitoring And Laser...

TDI Sensor in a Darkfield System

Method and Apparatus for Producing and Measuring Dynamically Focuse...

Multi-Spot Defect Inspection System

Monitoring Incident Beam Position in a Wafer Inspection System

Laser with Integrated Multi Line or Scanning Beam Capability

Extending the lifetime of a Deep UV laser in a Wafer Inspection tool

Method and apparatus for producing and Measuring dynamically focuss...