Brett E. McGrath

Follow

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing apparatus and methods using a flexibl...
- Patent number 6,926,589
- Issue date Aug 9, 2005
- ASM NuTool, Inc.
- Douglas W. Young
- B24 - GRINDING POLISHING
Information Patent Grant
Advanced chemical mechanical polishing system with smart endpoint d...
- Patent number 6,857,947
- Issue date Feb 22, 2005
- ASM-Nutool, Inc.
- Yuchun Wang
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Advanced chemical mechanical polishing system with smart endpoint d...
- Publication number 20040023606
- Publication date Feb 5, 2004
- Yuchun Wang
- B24 - GRINDING POLISHING
Information Patent Application
Chemical mechanical polishing apparatus and methods using a flexibl...
- Publication number 20030181143
- Publication date Sep 25, 2003
- Douglas W. Young
- B24 - GRINDING POLISHING