Brian Ahr

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for EUV mask inspection
- Patent number 11,635,700
- Issue date Apr 25, 2023
- Erel Milshtein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser produced plasma light source having a target material coated...
- Patent number 11,419,202
- Issue date Aug 16, 2022
- KLA Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generation for a laser produced plasma light source
- Patent number 11,343,899
- Issue date May 24, 2022
- KLA Corporation
- Brian Ahr
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser produced plasma light source having a target material coated...
- Patent number 10,893,599
- Issue date Jan 12, 2021
- KLA Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generation for a laser produced plasma light source
- Patent number 10,880,979
- Issue date Dec 29, 2020
- KLA Corporation
- Brian Ahr
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser produced plasma light source having a target material coated...
- Patent number 10,021,773
- Issue date Jul 10, 2018
- KLA-Tencor Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generation of extreme ultraviolet light
- Patent number 9,544,984
- Issue date Jan 10, 2017
- KLA-Tencor Corporation
- Alexander Bykanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Confocal Chromatic Metrology for EUV Source Condition Monitoring
- Publication number 20240090110
- Publication date Mar 14, 2024
- KLA Corporation
- Patrick Tae
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and Apparatus for EUV Mask Inspection
- Publication number 20220260928
- Publication date Aug 18, 2022
- KLA Corporation
- Erel Milshtein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Laser Produced Plasma Light Source Having a Target Material Coated...
- Publication number 20210136903
- Publication date May 6, 2021
- KLA Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATION FOR A LASER PRODUCED PLASMA LIGHT SOURCE
- Publication number 20210105886
- Publication date Apr 8, 2021
- KLA Corporation
- Brian Ahr
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser Produced Plasma Light Source Having a Target Material Coated...
- Publication number 20190075641
- Publication date Mar 7, 2019
- KLA-Tencor Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser Produced Plasma Light Source Having a Target Material Coated...
- Publication number 20170142817
- Publication date May 18, 2017
- KLA-Tencor Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Droplet Generation for a Laser Produced Plasma Light Source
- Publication number 20170131129
- Publication date May 11, 2017
- KLA-Tencor Corporation
- Brian Ahr
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Method and apparatus for EUV mask inspection

Laser produced plasma light source having a target material coated...

Droplet generation for a laser produced plasma light source

Laser produced plasma light source having a target material coated...

Droplet generation for a laser produced plasma light source

Laser produced plasma light source having a target material coated...

System and method for generation of extreme ultraviolet light

Patents Applicationslast 30 patents

Confocal Chromatic Metrology for EUV Source Condition Monitoring

Method and Apparatus for EUV Mask Inspection

Laser Produced Plasma Light Source Having a Target Material Coated...

DROPLET GENERATION FOR A LASER PRODUCED PLASMA LIGHT SOURCE

Laser Produced Plasma Light Source Having a Target Material Coated...

Laser Produced Plasma Light Source Having a Target Material Coated...

Droplet Generation for a Laser Produced Plasma Light Source