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Brian D. West
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Vancouver, WA, US
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last 30 patents
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Patent Grant
System for reducing wafer contamination using freshly, conditioned...
Patent number
6,503,363
Issue date
Jan 7, 2003
SEH America, Inc.
Masami Nakano
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
System for reducing wafer contamination
Publication number
20020053402
Publication date
May 9, 2002
Masami Nakano
H01 - BASIC ELECTRIC ELEMENTS