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Brian E. Bottema
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Austin, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of polishing a layer using a polishing pad
Patent number
7,985,122
Issue date
Jul 26, 2011
FREESCALE SEMICONDUCTOR, INC.
Brian Bottema
B24 - GRINDING POLISHING
Information
Patent Grant
Process of using a polishing apparatus including a platen window an...
Patent number
7,892,070
Issue date
Feb 22, 2011
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Grant
Grooved platen with channels or pathway to ambient air
Patent number
7,534,162
Issue date
May 19, 2009
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Grant
Platen endpoint window with pressure relief
Patent number
7,520,797
Issue date
Apr 21, 2009
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad, a polishing apparatus, and a process for using the p...
Patent number
7,497,763
Issue date
Mar 3, 2009
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad, a polishing apparatus, and a process for using the p...
Patent number
7,179,151
Issue date
Feb 20, 2007
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing carrier head with a modified pressure profile
Patent number
7,074,118
Issue date
Jul 11, 2006
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing system having a carrier head with substrate presence sensing
Patent number
6,905,392
Issue date
Jun 14, 2005
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polish (CMP) conditioning-disk holder
Patent number
6,887,138
Issue date
May 3, 2005
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
PROCESS OF USING A POLISHING APPARATUS INCLUDING A PLATEN WINDOW AN...
Publication number
20090023363
Publication date
Jan 22, 2009
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF POLISHING A LAYER USING A POLISHING PAD
Publication number
20070287361
Publication date
Dec 13, 2007
Brian Bottema
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad, a polishing apparatus, and a process for using the p...
Publication number
20070224917
Publication date
Sep 27, 2007
FREESCALE SEMICONDUCTOR, INC.
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Application
Platen endpoint window with pressure relief
Publication number
20070054602
Publication date
Mar 8, 2007
Freescale Semiconductor, Inc.
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Application
Grooved platen with channels or pathway to ambient air
Publication number
20070054601
Publication date
Mar 8, 2007
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Application
Polishing system having a carrier head with substrate presence sensing
Publication number
20040266324
Publication date
Dec 30, 2004
Brian E. Bottema
B24 - GRINDING POLISHING
Information
Patent Application
Chemical mechanical polish (CMP) conditioning-disk holder
Publication number
20040259487
Publication date
Dec 23, 2004
Brian E. Bottema
B24 - GRINDING POLISHING