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Brian George Heil
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Wiesbaden, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for controlling ion energy in radio frequency plasmas
Patent number
8,933,629
Issue date
Jan 13, 2015
Ruhr-Universität Bochum
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for controlling ion energy in radio frequency plasmas
Patent number
8,643,280
Issue date
Feb 4, 2014
Ruhr-Universität Bochum
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
Publication number
20140103808
Publication date
Apr 17, 2014
RUHR-UNIVERSITÄT BOCHUM
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
Publication number
20110248634
Publication date
Oct 13, 2011
RUHR-UNIVERSITAT
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS