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Methods for repair of photomasks
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Patent number 6,190,836
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Issue date Feb 20, 2001
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International Business Machines Corporation
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Brian J. Grenon
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Methods for repair of photomasks
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Patent number 6,165,649
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Issue date Dec 26, 2000
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International Business Machines Corporation
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Brian J. Grenon
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Method for repair of photomasks
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Patent number 6,156,461
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Issue date Dec 5, 2000
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International Business Machines Corporation
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Brian J. Grenon
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Methods for repair of photomasks
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Patent number 6,090,507
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Issue date Jul 18, 2000
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International Business Machines Corporation
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Brian J. Grenon
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Adaptive inspection method and system
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Patent number 5,978,501
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Issue date Nov 2, 1999
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International Business Machines Corporation
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Karen Marie Dusablon Badger
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G06 - COMPUTING CALCULATING COUNTING