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Brian Joseph Williams
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Tigard, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
Patent number
11,946,142
Issue date
Apr 2, 2024
Lam Research Corporation
Fayaz A. Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Carrier ring designs for controlling deposition on wafer bevel/edge
Patent number
11,837,495
Issue date
Dec 5, 2023
Lam Research Corporation
Michael J. Janicki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carrier ring designs for controlling deposition on wafer bevel/edge
Patent number
11,830,759
Issue date
Nov 28, 2023
Lam Research Corporation
Michael J. Janicki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
IMAGE ANALYSIS OF PLASMA CONDITIONS
Publication number
20240234112
Publication date
Jul 11, 2024
LAM RESEARCH CORPORATION
Michal Danek
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
Publication number
20240167161
Publication date
May 23, 2024
LAM RESEARCH CORPORATION
Fayaz A. Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARRIER RING DESIGNS FOR CONTROLLING DEPOSITION ON WAFER BEVEL/EDGE
Publication number
20240055293
Publication date
Feb 15, 2024
LAM RESEARCH CORPORATION
Michael John Janicki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PREDICTIVE MAINTENANCE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
Publication number
20230400847
Publication date
Dec 14, 2023
LAM RESEARCH CORPORATION
Jian Guo
G05 - CONTROLLING REGULATING
Information
Patent Application
SHOWERHEAD DESIGNS FOR CONTROLLING DEPOSITION ON WAFER BEVEL/EDGE
Publication number
20230167552
Publication date
Jun 1, 2023
LAM RESEARCH CORPORATION
Michael J. JANICKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PURGING SPINDLE ARMS TO PREVENT DEPOSITION AND WAFER SLIDING
Publication number
20230005776
Publication date
Jan 5, 2023
LAM RESEARCH CORPORATION
Prasanna KULKARNI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
Publication number
20220298632
Publication date
Sep 22, 2022
LAM RESEARCH CORPORATION
Fayaz A. Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMI...
Publication number
20220228263
Publication date
Jul 21, 2022
LAM RESEARCH CORPORATION
Michael Philip Roberts
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARRIER RING DESIGNS FOR CONTROLLING DEPOSITION ON WAFER BEVEL/EDGE
Publication number
20220115261
Publication date
Apr 14, 2022
LAM RESEARCH CORPORATION
Michael J. Janicki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CARRIER RING DESIGNS FOR CONTROLLING DEPOSITION ON WAFER BEVEL/EDGE
Publication number
20220108912
Publication date
Apr 7, 2022
LAM RESEARCH CORPORATION
Michael J. Janicki
H01 - BASIC ELECTRIC ELEMENTS