Brian Lu

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Device and method for manufacturing nanostructures consisting of ca...
- Patent number 9,822,451
- Issue date Nov 21, 2017
- Aixtron SE
- Ian Blackburn
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method and apparatus for fabricating dielectric structures
- Patent number 9,564,329
- Issue date Feb 7, 2017
- AIXTRON, SE
- Kay Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD flowable gap fill
- Patent number 9,257,302
- Issue date Feb 9, 2016
- Novellus Systems, Inc.
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming TiSiN thin film layer by using atomic layer depo...
- Patent number 9,159,608
- Issue date Oct 13, 2015
- Aixtron SE
- Woong Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD flowable gap fill
- Patent number 8,187,951
- Issue date May 29, 2012
- Novellus Systems, Inc.
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Density gradient-free gap fill
- Patent number 7,888,273
- Issue date Feb 15, 2011
- Novellus Systems, Inc.
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming low-temperature conformal dielectric films
- Patent number 7,678,709
- Issue date Mar 16, 2010
- Novellus Systems, Inc.
- Brian Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD flowable gap fill
- Patent number 7,629,227
- Issue date Dec 8, 2009
- Novellus Systems, Inc.
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal nanolaminate dielectric deposition and etch bag gap fill...
- Patent number 7,482,247
- Issue date Jan 27, 2009
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for improving the cracking resistance of low-k dielectric m...
- Patent number 7,381,662
- Issue date Jun 3, 2008
- Novellus Systems, Inc.
- Dong Niu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for UV exposure of low dielectric constant mat...
- Patent number 7,265,061
- Issue date Sep 4, 2007
- Novellus Systems, Inc.
- Seon-Mee Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of porogen removal from porous low-k films using UV radiation
- Patent number 7,208,389
- Issue date Apr 24, 2007
- Novellus Systems, Inc.
- Adrianne K. Tipton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for improving the cracking resistance of low-k dielectric m...
- Patent number 7,094,713
- Issue date Aug 22, 2006
- Novellus Systems, Inc.
- Dong Niu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus For Growing Binary, Ternary and Quaternary Mat...
- Publication number 20160068961
- Publication date Mar 10, 2016
- AIXTRON SE
- Ming-Te Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Fabricating Dielectric Structures
- Publication number 20150155157
- Publication date Jun 4, 2015
- Aixtron, Inc.
- Kay Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and method for manufacturing nanostructures consisting of ca...
- Publication number 20150140234
- Publication date May 21, 2015
- AIXTRON SE
- Ian Blackburn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING TiSiN THIN FILM LAYER BY USING ATOMIC LAYER DEPO...
- Publication number 20150050806
- Publication date Feb 19, 2015
- AIXTRON SE
- Woong Park
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Device and method for manufacturing nanostructures consisting of ca...

Method and apparatus for fabricating dielectric structures

CVD flowable gap fill

Method for forming TiSiN thin film layer by using atomic layer depo...

CVD flowable gap fill

Density gradient-free gap fill

Method of forming low-temperature conformal dielectric films

CVD flowable gap fill

Conformal nanolaminate dielectric deposition and etch bag gap fill...

Methods for improving the cracking resistance of low-k dielectric m...

Method and apparatus for UV exposure of low dielectric constant mat...

Method of porogen removal from porous low-k films using UV radiation

Methods for improving the cracking resistance of low-k dielectric m...

Patents Applicationslast 30 patents

Method and Apparatus For Growing Binary, Ternary and Quaternary Mat...

Method and Apparatus for Fabricating Dielectric Structures

Device and method for manufacturing nanostructures consisting of ca...

METHOD FOR FORMING TiSiN THIN FILM LAYER BY USING ATOMIC LAYER DEPO...