Brian Lu

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,215,262
- Issue date Jul 10, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,181,596
- Issue date May 22, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,146,530
- Issue date Apr 3, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20090064929
- Publication date Mar 12, 2009
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING